Yoku Ikeguchi, Kota Imanishi, Ryuki Nomura, M. Kimura, K. Umeda, M. Uenuma
{"title":"Ga-Sn-O热电器件的评价","authors":"Yoku Ikeguchi, Kota Imanishi, Ryuki Nomura, M. Kimura, K. Umeda, M. Uenuma","doi":"10.1109/IMFEDK.2018.8581963","DOIUrl":null,"url":null,"abstract":"A thermoelectric conversion element is a device for converting thermal energy into electric energy. Many thermoelectric materials are toxic and contain rare-metals. Thus we have evaluated thermoelectric effect of Ga-Sn-O (GTO) that is rare-metal free and less toxic. Moreover, how the annealing treatment affects the characteristics. As a result, the power factor was improved by annealing treatment, where the Seebeck coefficient is −284 µ V /K and the power factor is 0.031 mW/mK<sup>2</sup> at Ar:O<inf>2</inf> = 20:4 sccm. On the other hand, the carrier density measured using van der Pauw method is 2.25×10<sup>20</sup> /cm<sup>3</sup> and Hall mobility is 0.88 cm<sup>2</sup>/Vs.","PeriodicalId":434417,"journal":{"name":"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evaluation of Ga-Sn-O Thermoelectric Device\",\"authors\":\"Yoku Ikeguchi, Kota Imanishi, Ryuki Nomura, M. Kimura, K. Umeda, M. Uenuma\",\"doi\":\"10.1109/IMFEDK.2018.8581963\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A thermoelectric conversion element is a device for converting thermal energy into electric energy. Many thermoelectric materials are toxic and contain rare-metals. Thus we have evaluated thermoelectric effect of Ga-Sn-O (GTO) that is rare-metal free and less toxic. Moreover, how the annealing treatment affects the characteristics. As a result, the power factor was improved by annealing treatment, where the Seebeck coefficient is −284 µ V /K and the power factor is 0.031 mW/mK<sup>2</sup> at Ar:O<inf>2</inf> = 20:4 sccm. On the other hand, the carrier density measured using van der Pauw method is 2.25×10<sup>20</sup> /cm<sup>3</sup> and Hall mobility is 0.88 cm<sup>2</sup>/Vs.\",\"PeriodicalId\":434417,\"journal\":{\"name\":\"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMFEDK.2018.8581963\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMFEDK.2018.8581963","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A thermoelectric conversion element is a device for converting thermal energy into electric energy. Many thermoelectric materials are toxic and contain rare-metals. Thus we have evaluated thermoelectric effect of Ga-Sn-O (GTO) that is rare-metal free and less toxic. Moreover, how the annealing treatment affects the characteristics. As a result, the power factor was improved by annealing treatment, where the Seebeck coefficient is −284 µ V /K and the power factor is 0.031 mW/mK2 at Ar:O2 = 20:4 sccm. On the other hand, the carrier density measured using van der Pauw method is 2.25×1020 /cm3 and Hall mobility is 0.88 cm2/Vs.