汽车用镀金钯焊盘对重铜丝粘接的影响

B. S. Kumar, A. Albert, L. H. Lim
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引用次数: 3

摘要

铜(Cu)作为半导体封装中的互连材料,由于其优于金(Au)的主要优势,其市场份额正在迅速增加。当用贵金属替换部分键合垫时,由于与Au相比,铜键合线具有优越的电性能,更低的成本和更高的机械性能,因此特别值得关注。在包装开发阶段开始时,需要进行大量的工作和分析,以满足适当的可制造性和可靠性要求。焊丝键合工艺优化通常围绕键合时间、键合力和键合功率进行。通常评估铜线键合的其他因素包括输入键合垫清洁度,键合垫表面氧化,电子火焰关闭时的导线氧化和形成气体流速。一个不太为人所知的变量,模具附着,在铜线包装中经常被忽视。然而,在高温下(高于Tg)具有相对低模量和高弹性性能的模具附着(DA)材料可能会在电线粘合过程温度下引起问题。本文对三种DA材料类型进行了50um铜丝粘接和主要聚焦响应的评估,包括不粘焊垫(NSOP)和球抗剪强度(BST),并研究了在汽车应用中实现可靠的铜丝粘接的各种工艺因素。结果表明,DA材料性能对焊丝键合性能有显著影响。软焊料性能较好,因为焊料具有较高的弹性模量(MPa),即使在较高的焊接温度下也能保持。然而,聚合物DA1在高温下具有相对低的模量和高弹性,在较高的键合温度下,在较小的芯片尺寸下会产生NSOP和低球剪切。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of die attach material on heavy Cu wire bonding with Au coated Pd bond pad in automotive applications
Copper (Cu) is rapidly gaining an increasing market share as an interconnect material in semiconductor packaging because of its major advantages over gold (Au). When replacing part of the bond pad with a noble metal, Cu bonding wire is of particular interest due to its superior electrical properties, lower cost and higher mechanical properties as compared with Au. Extensive work and analysis are needed at the onset of the packaging development phase to meet the right level of manufacturability and reliability requirement. Wire bond process optimization commonly focus around bond time, bond force and bond power. Other factors generally evaluated for copper wire bonding include incoming bond pad cleanliness, bonding pad surface oxidation, wire oxidation during electronic flame off and forming gas flow rate. A lesser known variable, die attach, is often overlooked in packaging with Cu wire. However, die attach (DA) materials that have comparatively low modulus and high elastic properties at elevated temperature (above Tg) can cause problems at wire bonding process temperatures. In this paper three DA material types were evaluated using 50 um Cu wire bonding and main focusing responses of non stick on pad (NSOP) and ball shear strength (BST) as well investigates various process factors in achieving a reliable Cu wire bonding on heavy Cu wire bonding with Au coated Pd bond pad in automotive applications. The results showed that a significant influences from the DA material properties which affecting the wire bonding performance. DA Soft solder are better due to solder has higher elastic modulus (MPa) in even remain at higher bonding temperature. However Polymeric DA1 has comparatively low modulus and high elastic properties in elevated temperature can cause NSOP and low ball shear in smaller chip sizes at higher bonding temperature.
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