预封装贴装工艺流程建模与工艺参数优化

L. Ji, L. Wai, Min Woo Daniel Rhee
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引用次数: 1

摘要

本文提出了一种新的数值模型来描述预封装中的贴模过程。该方法成功地应用于附着在基板上的厚度为5mm × 5mm、厚度为70um的模具上,预测了各种工艺条件下附着模材料的最终圆角形状。重点讨论了模具附着物在模具顶面上的过流问题。模具上表面的污染可能会导致后续工序失效。仿真结果与实验结果进行了比较。得到了良好的匹配。通过仿真建立了一定数量模贴材料的工艺窗口,并预测了相应的不引起模贴材料过流的结合力。该数值研究的主要优点是提供了对工艺参数的深入了解,并提供了初始工艺窗口,以防止模具过流。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flow modeling of die attach process and the optimization of process parameters in advance packaging
This paper presents a new numerical model to characterize the die attach process in the advance packaging. With its successful application on a 5 mm by 5 mm with 70um thickness die attached to the substrate, final fillet shape of the die attach material is predicted for various process conditions. Focuses have been given on the die attach material over flow on the die top surface. The contamination on the die top surface may cause failures in the subsequent processes. The simulation results were compared with the experiment. Good match was obtained. Moreover, process window for a given amount die attach material was established through the simulation and the corresponding bonding force that will not cause die attach material over flow was predicted. Key advantage of this numerical study is to give the insights into process parameters and provide initial process window to prevent die attach over flow.
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