用光子计数成像表征ESD保护电路的动态空间传导模式

B. Yap, J. Jeng, L.L.S. Chang
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引用次数: 1

摘要

利用光子计数成像方法,有效地获得了极短脉冲应力下厚场氧化静电放电(ESD)保护器件的极弱脉冲电致发光。由此,它在不同电流、脉冲宽度和重复率下的动态空间传导模式可以直接可视化和评估。作者已经将这种成像方法成功地应用于ESD仿真过程中电路上的全系列空间脉冲发射模式的采集。这可以提供一种直接的方法,同时观察这种设备上出现的故障。双极NPN snapback在每个阶梯通道上的确切顺序开启性质及其在不同水平和宽度的脉动中传播的不均匀性也可以直接解决。作者报道了用该技术精确测定失效样品的电阻短路位置。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of dynamic spatial conduction patterns on ESD protection circuitry by photon-counting imaging
A photon-counting imaging method has been effectively employed to acquire the extremely weak pulse electroluminescence from a thick-field-oxide electrostatic discharge (ESD) protection device during very short pulse stressing. From this, its dynamic spatial conduction patterns with respect to different currents, pulse widths, and repetition rates could then be directly visualized and assessed. The authors have applied such an imaging method successfully in the acquisition of a full series of spatial pulsed emission patterns on circuitry during ESD simulation. This could offer a means for direct, simultaneous observation of emerging failure on such a device. The exact sequential turning-on nature of bipolar NPN snapback, on each ladder-channel and its non-uniformity in spread during different levels and widths of pulsation could also be resolved directly. The authors report on the accurate determination of the site of the resistive short on failed samples by this technique.<>
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