利用离轴失调的MEMS反射型可变光衰减器

IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI:10.1109/OMEMS.2002.1031440

Che-Heung Kim, N. Park, Yong-Kweon Kim

{"title":"利用离轴失调的MEMS反射型可变光衰减器","authors":"Che-Heung Kim, N. Park, Yong-Kweon Kim","doi":"10.1109/OMEMS.2002.1031440","DOIUrl":null,"url":null,"abstract":"This paper proposes a reflective type microelectromechanical system variable optical attenuator (MEMS VOA) which uses 45 degree tilted vertical movable mirror fabricated by a deep reactive ion etching (DRIE). The optical attenuation is generated by an optical axis offset controlled by the vertical mirror. Fibers are aligned passively on the vertical grooves which are formed at the same plane with the control actuator.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"34","resultStr":"{\"title\":\"MEMS reflective type variable optical attenuator using off-axis misalignment\",\"authors\":\"Che-Heung Kim, N. Park, Yong-Kweon Kim\",\"doi\":\"10.1109/OMEMS.2002.1031440\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes a reflective type microelectromechanical system variable optical attenuator (MEMS VOA) which uses 45 degree tilted vertical movable mirror fabricated by a deep reactive ion etching (DRIE). The optical attenuation is generated by an optical axis offset controlled by the vertical mirror. Fibers are aligned passively on the vertical grooves which are formed at the same plane with the control actuator.\",\"PeriodicalId\":285115,\"journal\":{\"name\":\"IEEE/LEOS International Conference on Optical MEMs\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"34\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/LEOS International Conference on Optical MEMs\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2002.1031440\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/LEOS International Conference on Optical MEMs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2002.1031440","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 34

摘要

提出了一种反射式微机电系统可变光衰减器(MEMS VOA)，该衰减器采用45度倾斜垂直可移动反射镜，该反射镜采用深度反应离子刻蚀(DRIE)技术。光衰减是由垂直反射镜控制的光轴偏移产生的。光纤被动地对准与控制致动器在同一平面上形成的垂直凹槽。

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MEMS reflective type variable optical attenuator using off-axis misalignment

This paper proposes a reflective type microelectromechanical system variable optical attenuator (MEMS VOA) which uses 45 degree tilted vertical movable mirror fabricated by a deep reactive ion etching (DRIE). The optical attenuation is generated by an optical axis offset controlled by the vertical mirror. Fibers are aligned passively on the vertical grooves which are formed at the same plane with the control actuator.

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IEEE/LEOS International Conference on Optical MEMs

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