{"title":"低能量多层SIMOX制备Si/SiO/sub / Bragg反射器","authors":"Y. Ishikawa, N. Shibata, S. Fukatsu","doi":"10.1109/SOI.1997.634931","DOIUrl":null,"url":null,"abstract":"We report successful fabrication of SIMOX-based epitaxial Bragg reflectors (BRs) to demonstrate the yet-to-be-explored potential of current SIMOX technology for conceivable optical applications.","PeriodicalId":344728,"journal":{"name":"1997 IEEE International SOI Conference Proceedings","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of Si/SiO/sub 2/ Bragg reflectors by low energy multiple SIMOX\",\"authors\":\"Y. Ishikawa, N. Shibata, S. Fukatsu\",\"doi\":\"10.1109/SOI.1997.634931\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report successful fabrication of SIMOX-based epitaxial Bragg reflectors (BRs) to demonstrate the yet-to-be-explored potential of current SIMOX technology for conceivable optical applications.\",\"PeriodicalId\":344728,\"journal\":{\"name\":\"1997 IEEE International SOI Conference Proceedings\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 IEEE International SOI Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.1997.634931\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1997.634931","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of Si/SiO/sub 2/ Bragg reflectors by low energy multiple SIMOX
We report successful fabrication of SIMOX-based epitaxial Bragg reflectors (BRs) to demonstrate the yet-to-be-explored potential of current SIMOX technology for conceivable optical applications.