深度缩放场效应管阈值电压漂移与工作寿命的相关性

B. Kaczer, J. Franco, M. Toledano-Luque, P. Roussel, M. Bukhori, A. Asenov, B. Schwarz, M. Bina, T. Grasser, G. Groeseneken
{"title":"深度缩放场效应管阈值电压漂移与工作寿命的相关性","authors":"B. Kaczer, J. Franco, M. Toledano-Luque, P. Roussel, M. Bukhori, A. Asenov, B. Schwarz, M. Bina, T. Grasser, G. Groeseneken","doi":"10.1109/IRPS.2012.6241839","DOIUrl":null,"url":null,"abstract":"In nm-sized FET devices with just a few gate oxide defects, the typically measured threshold voltage shifts are not obviously correlated with the device behavior at high gate bias. The largest shifts observed at the threshold voltage after the capture of a single carrier are reduced at higher gate biases. This degradation-mitigating effect is further shown to be amplified at lower channel doping. The understanding gained from 3D numerical simulations is captured in a simple analytic description of a single trapped-charge impact on the FET characteristics in the entire gate bias range. Potential use is illustrated in an improved lifetime projection and in circuit simulations of time-dependent variability.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"68 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"42","resultStr":"{\"title\":\"The relevance of deeply-scaled FET threshold voltage shifts for operation lifetimes\",\"authors\":\"B. Kaczer, J. Franco, M. Toledano-Luque, P. Roussel, M. Bukhori, A. Asenov, B. Schwarz, M. Bina, T. Grasser, G. Groeseneken\",\"doi\":\"10.1109/IRPS.2012.6241839\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In nm-sized FET devices with just a few gate oxide defects, the typically measured threshold voltage shifts are not obviously correlated with the device behavior at high gate bias. The largest shifts observed at the threshold voltage after the capture of a single carrier are reduced at higher gate biases. This degradation-mitigating effect is further shown to be amplified at lower channel doping. The understanding gained from 3D numerical simulations is captured in a simple analytic description of a single trapped-charge impact on the FET characteristics in the entire gate bias range. Potential use is illustrated in an improved lifetime projection and in circuit simulations of time-dependent variability.\",\"PeriodicalId\":341663,\"journal\":{\"name\":\"2012 IEEE International Reliability Physics Symposium (IRPS)\",\"volume\":\"68 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-04-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"42\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE International Reliability Physics Symposium (IRPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.2012.6241839\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International Reliability Physics Symposium (IRPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.2012.6241839","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 42

摘要

在具有少量栅极氧化物缺陷的纳米尺寸FET器件中,通常测量的阈值电压位移与器件在高栅极偏置下的行为没有明显的相关性。捕获单个载流子后在阈值电压处观察到的最大位移在较高的栅极偏置下减小。在低通道掺杂下,这种降解缓解效应进一步被放大。从三维数值模拟中获得的理解被捕获在整个栅极偏置范围内单个捕获电荷对FET特性影响的简单分析描述中。潜在的用途是在一个改进的寿命预测和时间相关的变异性的电路模拟说明。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The relevance of deeply-scaled FET threshold voltage shifts for operation lifetimes
In nm-sized FET devices with just a few gate oxide defects, the typically measured threshold voltage shifts are not obviously correlated with the device behavior at high gate bias. The largest shifts observed at the threshold voltage after the capture of a single carrier are reduced at higher gate biases. This degradation-mitigating effect is further shown to be amplified at lower channel doping. The understanding gained from 3D numerical simulations is captured in a simple analytic description of a single trapped-charge impact on the FET characteristics in the entire gate bias range. Potential use is illustrated in an improved lifetime projection and in circuit simulations of time-dependent variability.
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