CMOS MEMS洛伦兹力双轴扫描级

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352086

Chili-Ming Sun, Chuanwei Wang, W. Fang

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引用次数: 1

摘要

提出了一种利用洛伦兹力驱动的新型双轴CMOS MEMS扫描级。该器件已采用台积电2P4M工艺成功实现。由三个金属层实现的电流路由使每个轴能够独立驱动。测量结果表明，该器件每轴的谐振频率分别为1.36KHz和2.26KHz。

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CMOS MEMS Lorentz Force Dual-axis Scanning-Stage

This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing achieved by three metal layers enables the independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36KHz and 2.26KHz respectively for each axis.

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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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