固态气体传感器:电导率的某些方面和气敏薄膜中晶粒间势垒的重建

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351) Pub Date : 1998-10-06 DOI:10.1109/SMICND.1998.732344

A. Ivashchenko, I. Kerner

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引用次数: 0

摘要

研究了由多晶向弱织构态转变时，膜间势垒能谱的重建。讨论了该因素对薄膜式气体传感器电导率的影响。分析了几种障壁高度分布。

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Solid state gas sensors: Some aspects of electrical conductivity and reconstruction of intergrain barriers in the gas sensitive films

The energy spectrum reconstruction in film intergrain barriers due to transition from polycrystalline to weakly textured state is studied. The effect of this factor on electrical conductivity of film gas sensor is discussed. Several barrier height distributions were analysed.

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来源期刊

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)

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