{"title":"用于微型LED面板维修的并联解耦XY柔性定位平台","authors":"Wenxiu Lai, Jian Gao, Lanyu Zhang, Yongbin Zhong","doi":"10.1109/ICEPT50128.2020.9202966","DOIUrl":null,"url":null,"abstract":"In the field of microelectronics packaging, microled mass transferring technology has become the key for manufacturing of large-scale display panel, and the defect repair technology is particularly important for the quality control of the display panel. In general, this repair process requires the motion mechanism to reach and replace the defective chip target in a high-speed and high positioning precision for the entire panel. In order to meet the requirements of MicroLED panel repair, this paper introduces an XY parallel decoupling flexible micro-motion platform for the large-stroke macro-micro composite stage. The flexible platform is guided by two pairs of flexible double bridge amplifying mechanisms, which are distributed symmetrically around the moving platform. The mobile pair, which is spliced by S-type hinges, is connected to the moving platform to achieve the performance of decoupling input and output. Based on the micro stage structure, the flexibility and stiffness analysis are performed through static and dynamic modeling of the flexible platform. The particle swarm optimization method is used for size optimization and mechanism modeling. The performance of the micro-motion stage was verified by finite element simulation analysis. The simulation results show that the XY flexible platform proposed in this paper has good parallel decoupling and amplification ratio, and can be used to develop the macro-micro motion stage for defect repair of MicroLED panel.","PeriodicalId":136777,"journal":{"name":"2020 21st International Conference on Electronic Packaging Technology (ICEPT)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Parallel and Decoupled XY Flexible Positioning Platform for Micro LED Panel Repair\",\"authors\":\"Wenxiu Lai, Jian Gao, Lanyu Zhang, Yongbin Zhong\",\"doi\":\"10.1109/ICEPT50128.2020.9202966\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the field of microelectronics packaging, microled mass transferring technology has become the key for manufacturing of large-scale display panel, and the defect repair technology is particularly important for the quality control of the display panel. In general, this repair process requires the motion mechanism to reach and replace the defective chip target in a high-speed and high positioning precision for the entire panel. In order to meet the requirements of MicroLED panel repair, this paper introduces an XY parallel decoupling flexible micro-motion platform for the large-stroke macro-micro composite stage. The flexible platform is guided by two pairs of flexible double bridge amplifying mechanisms, which are distributed symmetrically around the moving platform. The mobile pair, which is spliced by S-type hinges, is connected to the moving platform to achieve the performance of decoupling input and output. Based on the micro stage structure, the flexibility and stiffness analysis are performed through static and dynamic modeling of the flexible platform. The particle swarm optimization method is used for size optimization and mechanism modeling. The performance of the micro-motion stage was verified by finite element simulation analysis. The simulation results show that the XY flexible platform proposed in this paper has good parallel decoupling and amplification ratio, and can be used to develop the macro-micro motion stage for defect repair of MicroLED panel.\",\"PeriodicalId\":136777,\"journal\":{\"name\":\"2020 21st International Conference on Electronic Packaging Technology (ICEPT)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 21st International Conference on Electronic Packaging Technology (ICEPT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEPT50128.2020.9202966\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 21st International Conference on Electronic Packaging Technology (ICEPT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT50128.2020.9202966","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Parallel and Decoupled XY Flexible Positioning Platform for Micro LED Panel Repair
In the field of microelectronics packaging, microled mass transferring technology has become the key for manufacturing of large-scale display panel, and the defect repair technology is particularly important for the quality control of the display panel. In general, this repair process requires the motion mechanism to reach and replace the defective chip target in a high-speed and high positioning precision for the entire panel. In order to meet the requirements of MicroLED panel repair, this paper introduces an XY parallel decoupling flexible micro-motion platform for the large-stroke macro-micro composite stage. The flexible platform is guided by two pairs of flexible double bridge amplifying mechanisms, which are distributed symmetrically around the moving platform. The mobile pair, which is spliced by S-type hinges, is connected to the moving platform to achieve the performance of decoupling input and output. Based on the micro stage structure, the flexibility and stiffness analysis are performed through static and dynamic modeling of the flexible platform. The particle swarm optimization method is used for size optimization and mechanism modeling. The performance of the micro-motion stage was verified by finite element simulation analysis. The simulation results show that the XY flexible platform proposed in this paper has good parallel decoupling and amplification ratio, and can be used to develop the macro-micro motion stage for defect repair of MicroLED panel.