用于微型LED面板维修的并联解耦XY柔性定位平台

Wenxiu Lai, Jian Gao, Lanyu Zhang, Yongbin Zhong
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引用次数: 1

摘要

在微电子封装领域,微led传质技术已成为大规模显示面板制造的关键,而缺陷修复技术对显示面板的质量控制尤为重要。一般来说,这种修复过程要求运动机构以高速和高定位精度对整个面板达到并替换有缺陷的芯片目标。为了满足MicroLED面板维修的要求,本文介绍了一种用于大行程宏微复合工作台的XY并联解耦柔性微运动平台。柔性平台由对称分布在移动平台周围的两对柔性双桥放大机构引导。移动副通过s型铰链拼接,与移动平台连接,实现输入输出解耦的性能。基于微舞台结构,通过对柔性平台进行静、动态建模,进行柔度和刚度分析。采用粒子群优化方法进行尺寸优化和机理建模。通过有限元仿真分析验证了微动工作台的性能。仿真结果表明,本文提出的XY柔性平台具有良好的并联去耦和放大比,可用于开发MicroLED面板缺陷修复的宏微运动平台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Parallel and Decoupled XY Flexible Positioning Platform for Micro LED Panel Repair
In the field of microelectronics packaging, microled mass transferring technology has become the key for manufacturing of large-scale display panel, and the defect repair technology is particularly important for the quality control of the display panel. In general, this repair process requires the motion mechanism to reach and replace the defective chip target in a high-speed and high positioning precision for the entire panel. In order to meet the requirements of MicroLED panel repair, this paper introduces an XY parallel decoupling flexible micro-motion platform for the large-stroke macro-micro composite stage. The flexible platform is guided by two pairs of flexible double bridge amplifying mechanisms, which are distributed symmetrically around the moving platform. The mobile pair, which is spliced by S-type hinges, is connected to the moving platform to achieve the performance of decoupling input and output. Based on the micro stage structure, the flexibility and stiffness analysis are performed through static and dynamic modeling of the flexible platform. The particle swarm optimization method is used for size optimization and mechanism modeling. The performance of the micro-motion stage was verified by finite element simulation analysis. The simulation results show that the XY flexible platform proposed in this paper has good parallel decoupling and amplification ratio, and can be used to develop the macro-micro motion stage for defect repair of MicroLED panel.
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