循环加载条件下微电子封装双材料界面表征的加速方法

Emad A. Poshtan, S. Rzepka, B. Michel, C. Silber, B. Wunderle
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引用次数: 7

摘要

本文提出了一种基于微型循环混合模弯曲(MCMB)试验装置的双材料界面在循环载荷下的快速、经济的表征方法。改进的单腿弯曲(MSLB)样品直接从生产线薄四平面封装(TQFP)中获得,该生产线提供混合模式I + II加载条件。在亚临界循环加载下,聚合物-金属界面处出现裂纹。裂纹长度的测量方法有三种:(1)显微镜原位测量;(2)灰度相关法;(3)数值法。发现裂纹扩展速率与应变能释放率(ERR)范围呈幂律关系。此外,还讨论了等离子体清洗对界面粘附性能即裂纹萌生和扩展的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An accelerated method for characterization of bi-material interfaces in microelectronic packages under cyclic loading conditions
In this paper, an accelerated and cost-effective characterization method for bi-material interfaces under cyclic loading using a Miniaturized Cyclic Mixed-mode Bending (MCMB) test setup is presented. The Modified Single Leg Bending (MSLB) samples are acquired directly from production-line Thin Quad Flat Package (TQFP) which provide a mixed-mode I + II loading condition. Under sub-critical cyclic loading, crack was found to occur at the polymer-metal interface. The crack length is measured using three methods: (i) in-situ measurements using microscope (ii) gray scale correlation method (iii) numerical method. The crack growth rate was found to have a power-law dependence on the strain Energy Release Rate (ERR) range. In addition influence of plasma cleaning on interfacial adhesion properties namely, crack initiation and propagation is discussed.
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