采用自对准安装技术制备了一、二维塑料插座型vcsel阵列模块

H. Kosaka, M. Kajita, M. Yamada, Y. Sugimoto, K. Kurata, T. Tanabe, Y. Kasukawa
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引用次数: 15

摘要

我们开发了一维和二维推/拉-插座型垂直腔面发射激光器(VCSEL)阵列模块。一维(1-D) 8通道模块与传统的机械可转移多光纤推入(MPO)光纤连接器连接。对于二维(2- d) 16通道模块,我们开发了一个8/spl × 2的2- d推/拉光纤连接器。这些模块采用基于塑料的插座封装直接连接到光纤连接器。vcsel阵列芯片通过倒装键合自对准Si衬底后,衬底也通过自对准安装机自对准封装。一维和二维模块的光耦合损耗分别为2.1/spl plusmn/0.4和2.1/spl plusmn/0.8 dB。这些模块在没有隔离器的情况下以1 Gbps/ch的比特率工作,并且显示出高达70/spl度/C的无地板误码率性能。在1 Gbps/ch时,它们的光灵敏度分别为-25.0 dBm/spl plusmn/1.0 dB和-26.0 dBm/spl plusmn/0.9 dB。这些结构和技术适用于高密度、高吞吐量的互连。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Plastic-based receptacle-type VCSEL-array modules with one and two dimensions fabricated using the self-alignment mounting technique
We have developed one-dimensional and two-dimensional push/pull-receptacle-type vertical-cavity surface-emitting laser (VCSEL)-array modules. The one-dimensional (1-D) 8-channel module connects with a conventional mechanically-transferable multifiber push-on (MPO) fiber connector. For the two-dimensional (2-D) 16-channel module, we developed an 8/spl times/2 2-D push/pull fiber connector. These modules employ plastic-based receptacle packages directly joined to the fiber connector. After the VCSEL-array chip was self-aligned to the Si substrate by using flip-chip bonding, the substrate was also self-aligned to the package by using a self-alignment mounting machine. Optical coupling losses for the 1-D and the 2-D modules were respectively 2.1/spl plusmn/0.4 and 2.1/spl plusmn/0.8 dB. The modules were operated at a bit rate of 1 Gbps/ch without an isolator and showed floorless BER performance up to 70/spl deg/C. At 1 Gbps/ch their optical sensitivities were respectively -25.0 dBm/spl plusmn/1.0 dB and -26.0 dBm/spl plusmn/0.9 dB. These structures and techniques are applicable to high-density, high-throughput interconnection.
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