符合ISO 14001标准的无排放蒸馏DIW封闭系统

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) Pub Date : 1997-10-06 DOI:10.1109/ISSM.1997.664514

K. Koba, S. Momose, S. Inoue, C. Ban, K. Sato

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引用次数: 0

摘要

它要求半导体工厂产生“零”工业废料。从无排放的角度来看，蒸馏系统是非常优秀的，因为它们不需要化学物质来净化水，也不需要定期更换材料。我们开发了第一个用于半导体制造的蒸馏去离子水(DIW)系统，并演示了用于四分之一微米器件生产的蒸馏去离子水的质量。然后，我们设计了多种采用不同工艺的无排放蒸馏DIW封闭系统，并对这些系统的成本进行了研究。

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Emission-free distilled DIW closed system for ISO 14001

It is required that semiconductor factories generate "zero" industrial waste materials. Distillation systems are excellent from an emission-free stand point because they require no chemicals to purify the water and no periodical replacement of materials. We developed the first distilled deionized water (DIW) system for semiconductor manufacturing, and demonstrated the quality of distilled DIW for quarter micron device production. Then we designed a variety of an emission-free distilled DIW closed systems utilizing different processes, and investigated the costs of these systems.

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来源期刊

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)

CiteScore

0.80

自引率

0.00%

发文量