高速BiCMOS技术中寄生集电极串联电阻贡献的先进提取方法

F. Stein, N. Derrier, C. Maneux, D. Céli
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引用次数: 3

摘要

寄生集电极电阻对采用先进SiGe技术制造的HBT器件性能有重要影响。外部集电极电阻贡献RCx是交流和瞬态运行的关键建模参数。如果集电极电阻估计不正确,则模型器件的射频性能可能与制造的HBT有显著差异。提出了一种先进的电阻提取测试结构,并以两种不同的方式进行了测试。利用解析方程和准三维装置仿真验证了得到的电阻值和提取结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advanced extraction procedure for parasitic collector series resistance contributions in high-speed BiCMOS technologies
The parasitic collector resistance is of high importance for device performance of HBT manufactured in advanced SiGe technologies. The external collector resistance contribution RCx is a critical modeling parameter for AC and transient operation. If the collector resistance is estimated incorrectly, the RF performance of the modeled device may significantly differ from the manufactured HBT. An advanced test structure for resistance extraction is presented and measured in two different ways. The obtained resistance values and extraction results are verified using analytical equations and quasi-three-dimensional device simulations.
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