薄膜印刷器件按需喷墨工艺的发展

S. I. Garduño, Angel Sacramento-Orduño, M. Ramírez-Como, M. I. Reyes-Valderrama, V. Rodríguez-Lugo, Magali Estrada
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引用次数: 0

摘要

喷墨印刷(IJP)的主要优点在于它能够消除光刻和蚀刻工艺,这是硅制造技术的基础。这是由于溶液处理的材料直接沉积在预定的模式。虽然IJP已经应用于各种薄膜器件(TFD)的生产,但在实现完全印刷的TFD方面仍然存在重大挑战。其中包括使用按需滴墨(DoD)打印机调整配方油墨的流变特性,以及全面了解IJP工艺所需的参数和条件,以产生所需的形态、薄膜厚度和图案面积均匀性。本研究提出了一种溶液加工材料的IJP工艺,不仅考虑了油墨的流变特性,而且考虑了所采用的DoD打印机的参数和设置条件。具有特定的IJP流变特性的商业油墨用于在连续喷射条件下打印具有不同分辨率的材料图案。利用原子力显微镜、椭偏显微镜和光学显微镜对印刷材料的形貌和薄膜厚度变化进行了表征。所获得的结果取决于油墨中的流变特性和固体含量,以及DoD打印机的配置参数。这些研究结果可以为提高不同材料的表面润湿性和发展不同材料印花图案的叠层提供有价值的证据。本工作的重点是通过完整的IJP工艺制备tfd并提高其性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of Drop-On-Demand Inkjet Process for the Fabrication of Thin-Film Printed Devices
The main benefit of inkjet printing (IJP) lies in its ability to eliminate the photolithography and etching processes that are fundamental to silicon manufacturing technology. This is due to the direct deposition of solution-processed materials in predefined patterns. Although IJP has been employed in the production of various thin-film devices (TFD), there are still significant challenges in achieving fully printed TFDs. These include adjusting the rheological properties of formulated inks with drop-on-demand (DoD) printers and developing a comprehensive understanding of the parameters and conditions required for the IJP process to yield a desired morphology, film thickness, and pattern area uniformity. This investigation proposes to develop a process for the IJP of solution-processed materials, considering not only the ink rheological properties but also the parameters and setup conditions of the DoD printer employed. Commercial inks with specific rheological properties for IJP are used to print materials patterns with different resolutions, under continuous ejection conditions. The morphology and film thickness variations of the printed material are characterized by employing atomic force microscopy, ellipsometry, and optical microscopy. The obtained results depend on the rheological properties and solid content in the ink, as well as the configured parameters of the DoD printer. These findings can provide valuable evidence for attaining optimal conditions to enhance the surface wettability and develop the stacking of printed patterns of different materials. The focus of this work is on the fabrication of TFDs through a complete IJP process and improving their performance.
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