WCDM2 -晶圆级带电器件模型测试，具有高重复性

2011 International Reliability Physics Symposium Pub Date : 2011-04-10 DOI:10.1109/IRPS.2011.5784509

N. Jack, T. Maloney, B. Chou, E. Rosenbaum

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引用次数: 5

摘要

在晶圆级产生类似cdm的单极脉冲，具有良好的重复性和线性。脉冲宽度和上升时间与FICDM测试仪相似。原位应力前后曲线追踪揭示了被测设备当前的失效阈值。

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WCDM2 — Wafer-level charged device model testing with high repeatability

CDM-like unipolar pulses are generated at the wafer level with excellent repeatability and linearity. Pulse width and rise time resemble that of FICDM testers. In-situ pre- and post-stress curve tracing reveals the current failure threshold for the device under test.

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2011 International Reliability Physics Symposium

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