工艺角对SRAM α和中子软误差率影响的实验表征

2012 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2012-04-15 DOI:10.1109/IRPS.2012.6241813

G. Gasiot, M. Glorieux, S. Uznanski, S. Clerc, P. Roche

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引用次数: 17

摘要

本文展示了经过不同工艺角处理的SRAM试验车的α和中子实验软错误率表征，以模拟量产中遇到的变异性。它允许评估与加速SER测试兼容的少量样品的大变异性效应。这使得研究大规模生产中可变性对十纳米技术软错误率的影响成为可能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Experimental characterization of process corners effect on SRAM alpha and neutron Soft Error Rates

This paper shows alpha and neutron experimental Soft Error Rate characterization of a SRAM test vehicle processed with different process corners in order to emulate the variability encountered in volume production. It allows assessing large variability effects with few samples that are compatible with accelerated SER testing. This allows investigating the effect of variability in mass-production on soft error rate of deca-nanometric technologies.

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2012 IEEE International Reliability Physics Symposium (IRPS)

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