{"title":"第二次实验室间电迁移实验征集","authors":"H. Schafft, E. Achee","doi":"10.1109/IRWS.1994.515850","DOIUrl":null,"url":null,"abstract":"The first interlaboratory experiment was conducted by NIST in the middle eighties to assess the industry's measurement capability, using their own test methods, for measuring electromigration t,, and sigma, and to identify sources for variability. This effort resulted from recommendations that were made to NIST at the 1983 Wafer Level Reliability Workshop. The results of that experiment were published [l] and used in the preparation of an ASTM standard method, ASTM F1260 121. The method now requires a determination of the interlaboratory precision of the method -otherwise it will soon be discontinued as an ASTM standard. Plans are underway to conduct a second interlaboratory experiment, where the participating laboratories will use the standard method to make their measurements. The purposes of the experiment are to determine the precision of the method, re-evaluate the sources for variability, refine the standard, and permit calibration with the reference laboratory, NIST. In preparation, a NIST test station for packagelevel testing has been assembled and new test and analysis software has been written in a collaborative effort with NIST guest researcher E.T. AchCe, of AMD. Ehren T. Achke AMD Austin, TX Tel: 512-602-5657 ehren.achee@amd.com","PeriodicalId":164872,"journal":{"name":"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Call to Participate in Second Interlaboratory Electromigration Experiment\",\"authors\":\"H. Schafft, E. Achee\",\"doi\":\"10.1109/IRWS.1994.515850\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The first interlaboratory experiment was conducted by NIST in the middle eighties to assess the industry's measurement capability, using their own test methods, for measuring electromigration t,, and sigma, and to identify sources for variability. This effort resulted from recommendations that were made to NIST at the 1983 Wafer Level Reliability Workshop. The results of that experiment were published [l] and used in the preparation of an ASTM standard method, ASTM F1260 121. The method now requires a determination of the interlaboratory precision of the method -otherwise it will soon be discontinued as an ASTM standard. Plans are underway to conduct a second interlaboratory experiment, where the participating laboratories will use the standard method to make their measurements. The purposes of the experiment are to determine the precision of the method, re-evaluate the sources for variability, refine the standard, and permit calibration with the reference laboratory, NIST. In preparation, a NIST test station for packagelevel testing has been assembled and new test and analysis software has been written in a collaborative effort with NIST guest researcher E.T. AchCe, of AMD. Ehren T. Achke AMD Austin, TX Tel: 512-602-5657 ehren.achee@amd.com\",\"PeriodicalId\":164872,\"journal\":{\"name\":\"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRWS.1994.515850\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.1994.515850","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
第一个实验室间实验是由NIST在80年代中期进行的,以评估行业的测量能力,使用他们自己的测试方法,测量电迁移t,和sigma,并确定可变性的来源。这一努力源于1983年在NIST晶圆级可靠性研讨会上提出的建议。该实验的结果发表了[1],并用于制备ASTM标准方法ASTM F1260 121。该方法现在需要确定该方法的实验室间精度-否则它将很快停止作为ASTM标准。正在计划进行第二次实验室间实验,其中参与的实验室将使用标准方法进行测量。实验的目的是确定方法的精度,重新评估可变性的来源,完善标准,并允许与参考实验室NIST进行校准。在准备工作中,一个用于封装级测试的NIST测试站已经组装完成,新的测试和分析软件已经与NIST客座研究员AMD的E.T. AchCe合作编写完成。Ehren T. Achke AMD Austin, TX电话:512-602-5657 ehren.achee@amd.com
Call to Participate in Second Interlaboratory Electromigration Experiment
The first interlaboratory experiment was conducted by NIST in the middle eighties to assess the industry's measurement capability, using their own test methods, for measuring electromigration t,, and sigma, and to identify sources for variability. This effort resulted from recommendations that were made to NIST at the 1983 Wafer Level Reliability Workshop. The results of that experiment were published [l] and used in the preparation of an ASTM standard method, ASTM F1260 121. The method now requires a determination of the interlaboratory precision of the method -otherwise it will soon be discontinued as an ASTM standard. Plans are underway to conduct a second interlaboratory experiment, where the participating laboratories will use the standard method to make their measurements. The purposes of the experiment are to determine the precision of the method, re-evaluate the sources for variability, refine the standard, and permit calibration with the reference laboratory, NIST. In preparation, a NIST test station for packagelevel testing has been assembled and new test and analysis software has been written in a collaborative effort with NIST guest researcher E.T. AchCe, of AMD. Ehren T. Achke AMD Austin, TX Tel: 512-602-5657 ehren.achee@amd.com