用于正交误差补偿的科氏振动微陀螺仪的全局建模与仿真

2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2010-04-26 DOI:10.1109/ESIME.2010.5464608

M. Descharles, J. Guerard, H. Kokabi

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引用次数: 2

摘要

ONERA一直在开发一种名为VIG(振动集成陀螺仪)的科里奥利振动陀螺仪(CVG)。制造过程中产生的结构缺陷导致音叉几何形状不对称。它会增加对相位和温度变化的敏感性，并导致差的偏置稳定性，从而限制了性能。本文通过补偿正交误差的方法，对该系统进行了全局建模，提高了系统的性能。给出了微陀螺仪的完整模型，包括机械和电气方面。对其性能的分析主要集中在机械耦合上，旨在实现将偏置稳定性提高7倍的解决方案。

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Global modelling and simulation of a Coriolis vibrating micro-gyroscope for quadrature error compensation

ONERA has been developing a Coriolis Vibrating Gyroscope (CVG) named VIG (Vibrating Integrated Gyro). The fabrication process generates structural defects which induce asymetries in the tunning fork geometry. It results in undesirable quadrature error which limitates the performance by increasing sensitivity to phase and temperature variation and causing poor bias stability. This paper deals with the global modelling of the VIG to improve its performances by compensating quadrature error. A full model of the micro-gyroscope is presented, covering mechanical and electrical aspects. The analysis of its performances is focused on mechanical coupling and aims at implementing a solution to improve bias stability by 7 times.

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2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)

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