基于柔性互连工艺的小间距(54 /spl mu/m)倒装芯片的研制

J. Maattanen, P. Palm, Y. de Maquille, N. Bauduin
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引用次数: 6

摘要

更轻、更小、更快和更便宜是用来描述现代电子产品趋势的神奇词汇。小型化是移动设备市场发展的必然趋势。除了移动电话之外,还有其他几个应用领域,如智能卡,智能衣服,便携式微型计算机,相机,娱乐电子产品等。最大的挑战是找到最有效的技术,以具有竞争力的价格生产所有这些设备。关键因素是互连技术。无铅和无卤素生产等环境因素是必须考虑的其他挑战。本文介绍了细间距(54 /spl mu/m)柔性倒装芯片(fof)互连的发展。影响高密度互连可靠性的因素有:柔性材料、测试芯片的碰撞、连接设备和用于连接的各向异性导电胶粘剂。在开发阶段,我们注意到,通过仔细的测试和正确的选择,可以找到高密度互连的材料和工艺的工作组合。为确保可靠性,对样品进行了热冲击试验(-40C/spl rlhar2/+125C)和85C/85R.H。湿度测试。采用截面试样分析了失效触点可能的失效机理。使用了两种不同类型的测试设备。接触电阻采用四点法测量,串联电阻采用菊花链法测量。结果是欧盟支持的发展项目的一部分。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of fine pitch (54 /spl mu/m) flip chip on flex interconnection process
Lighter, smaller, faster and cheaper are the magic words used to describe the trends in modern electronics. The miniaturization is a must in the market of the portable devices. Beside of the mobile phones there are several other application areas like smart cards, smart cloths, portable minicomputers, cameras, entertainment electronics and so on. The big challenge is to find the most effective technology to produce all those devices with competitive prices. The key factor is the interconnection technology. The environmental factors like lead and halogen free production are other challenges that must be taken into account This paper presents the development of fine pitch (54 /spl mu/m) flip chip on flex (FCOF) interconnection. There are several factors affecting to the reliability of the high density interconnection like the flex material, the bumping of the test chips, the bonding equipment and the anisotropically conductive adhesive used to make the connection. During the development phase it was noticed that by a careful testing and by making right selections it is possible to find working combination of materials and processes for high density interconnection. To insure the reliability, the samples were tested using thermal shock tests (-40C/spl rlhar2/+125C) and 85C/85R.H. humidity test. Cross section samples were made to analyze the possible failure mechanism of failed contacts. Two different types of test devices were used. The contact resistance was measured with four-point method and the series resistance with Daisy chain method. The results area part of development project supported by European Union.
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