自适应高压应力方法在FinFET技术上实现汽车质量

2021 IEEE International Test Conference (ITC) Pub Date : 2021-10-01 DOI:10.1109/ITC50571.2021.00039

S. Traynor, Chen He, Y. Y. Yu, Ken Klein

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引用次数: 1

摘要

高压应力测试(HVST)是筛选潜在缺陷以确保汽车半导体器件质量的关键。本文介绍了一种基于实时电流测量的自适应调整高压电压的新方法，以确保在测试器硬件电流限制范围内，每个部件在尽可能高的电压下可靠地承受应力，并具有等效的外部缺陷覆盖。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Adaptive High Voltage Stress Methodology to Enable Automotive Quality on FinFET Technologies

High Voltage Stress Test (HVST) is critical for screening out latent defects to ensure quality on automotive semiconductor devices. This paper describes a novel way to adaptively adjust HVST stress voltage based on real-time current measurement to ensure every part is stressed reliably at the highest possible voltage within the tester hardware current limit as well as with equivalent extrinsic defect coverage on FinFET technologies.

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来源期刊

2021 IEEE International Test Conference (ITC)

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