电路互连电迁移失效

M. Lin, A. Oates
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引用次数: 10

摘要

研究表明,为了准确预测多段导体中电迁移漏洞的位置,需要对稳态应力进行分析。电迁移空洞形成于应力最大的区域,而这些区域并不一定与电流密度最高的区域重合。结合应力对临界电流密度的影响,预测了类电路互连的失效时间分布。传统的电流密度分析在确定电迁移损伤位置和预测失效时间方面通常是不准确的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electromigration failure of circuit interconnects
We show that analysis of steady-state stress is required to accurately predict the location of electromigration vulnerabilities in multi-segment conductors. Electromigration voids form at regions of maximum stress, and these do not necessarily coincide with the highest current density regions. Failure time distributions of circuit-like interconnects are predicted by incorporating the effect of stress on critical current densities. Conventional current density analysis is generally inaccurate in identifying locations of electromigration damage and predictions of failure time.
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