氢自由基法去除铜表面氧化物

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947468

S. Shin, E. Higurashi, K. Furuyama, T. Suga

{"title":"氢自由基法去除铜表面氧化物","authors":"S. Shin, E. Higurashi, K. Furuyama, T. Suga","doi":"10.23919/LTB-3D.2017.7947468","DOIUrl":null,"url":null,"abstract":"Hydrogen radicals were used to remove the oxide layer of copper metal. Successful removal of the oxide layer was detected using X-ray photoelectron spectroscopy (XPS), where the visible color change has occurred after the treatment. Period of re-oxidization was further analyzed which then was compared to argon ion beam and fast atom beam (FAB) treatment. The approach has introduced a highly promising technique to remove oxide layers of metals.","PeriodicalId":183993,"journal":{"name":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Hydrogen radical treatment for surface oxide removal from copper\",\"authors\":\"S. Shin, E. Higurashi, K. Furuyama, T. Suga\",\"doi\":\"10.23919/LTB-3D.2017.7947468\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Hydrogen radicals were used to remove the oxide layer of copper metal. Successful removal of the oxide layer was detected using X-ray photoelectron spectroscopy (XPS), where the visible color change has occurred after the treatment. Period of re-oxidization was further analyzed which then was compared to argon ion beam and fast atom beam (FAB) treatment. The approach has introduced a highly promising technique to remove oxide layers of metals.\",\"PeriodicalId\":183993,\"journal\":{\"name\":\"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/LTB-3D.2017.7947468\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/LTB-3D.2017.7947468","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

采用氢自由基法去除金属铜的氧化层。利用x射线光电子能谱(XPS)检测到氧化层的成功去除，处理后发生了可见的颜色变化。进一步分析了再氧化周期，并与氩离子束和快原子束(FAB)处理进行了比较。该方法引入了一种非常有前途的技术来去除金属的氧化层。

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Hydrogen radical treatment for surface oxide removal from copper

Hydrogen radicals were used to remove the oxide layer of copper metal. Successful removal of the oxide layer was detected using X-ray photoelectron spectroscopy (XPS), where the visible color change has occurred after the treatment. Period of re-oxidization was further analyzed which then was compared to argon ion beam and fast atom beam (FAB) treatment. The approach has introduced a highly promising technique to remove oxide layers of metals.

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来源期刊

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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