H. Sonoda, R. Atsumi, M. Mita, K. Yamasaki, K. Maekawa
{"title":"电力电子器件用铁氧体/环氧树脂基板上铜微粒的按需激光烧结","authors":"H. Sonoda, R. Atsumi, M. Mita, K. Yamasaki, K. Maekawa","doi":"10.1109/EPTC.2016.7861494","DOIUrl":null,"url":null,"abstract":"Thick copper wiring on ferrite/epoxy resin substrate was carried out by laser sintering of the paste prepared with 1 μm-diameter copper micro-particles and organic solvents. A 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate are used for laser ablation of the substrate and laser sintering. From the microscopic observations and property evaluations of the laser-processed ferrite/epoxy resin substrate with copper, the following conclusions are obtained: (1) The paste prepared with 1 μm-diameter copper and organic solvents made it possible a small-volume dispensing as well as a good laser sintering; (2) The use of 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate, resulting in the formation of the laser-sintered film with 20 μm in thickness and 15 μΩ·cm in specific resistance. No damage to the substrate occurred; (3) The adhesion between the sintered film and the substrate is attributed to the removal of the surface epoxy layer by laser ablation. Copper micro-particles penetrate to the exposed ferrite particles, being mechanically locked with each other at the interface; (4) The scratch test with a cotton swab and the peel test with an adhesion tape show that no separation took place at the interface.","PeriodicalId":136525,"journal":{"name":"2016 IEEE 18th Electronics Packaging Technology Conference (EPTC)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"On-demand laser-sintering of copper micro-particles on ferrite/epoxy resin substrates for power electronics devices\",\"authors\":\"H. Sonoda, R. Atsumi, M. Mita, K. Yamasaki, K. Maekawa\",\"doi\":\"10.1109/EPTC.2016.7861494\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thick copper wiring on ferrite/epoxy resin substrate was carried out by laser sintering of the paste prepared with 1 μm-diameter copper micro-particles and organic solvents. A 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate are used for laser ablation of the substrate and laser sintering. From the microscopic observations and property evaluations of the laser-processed ferrite/epoxy resin substrate with copper, the following conclusions are obtained: (1) The paste prepared with 1 μm-diameter copper and organic solvents made it possible a small-volume dispensing as well as a good laser sintering; (2) The use of 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate, resulting in the formation of the laser-sintered film with 20 μm in thickness and 15 μΩ·cm in specific resistance. No damage to the substrate occurred; (3) The adhesion between the sintered film and the substrate is attributed to the removal of the surface epoxy layer by laser ablation. Copper micro-particles penetrate to the exposed ferrite particles, being mechanically locked with each other at the interface; (4) The scratch test with a cotton swab and the peel test with an adhesion tape show that no separation took place at the interface.\",\"PeriodicalId\":136525,\"journal\":{\"name\":\"2016 IEEE 18th Electronics Packaging Technology Conference (EPTC)\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 18th Electronics Packaging Technology Conference (EPTC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EPTC.2016.7861494\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 18th Electronics Packaging Technology Conference (EPTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EPTC.2016.7861494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On-demand laser-sintering of copper micro-particles on ferrite/epoxy resin substrates for power electronics devices
Thick copper wiring on ferrite/epoxy resin substrate was carried out by laser sintering of the paste prepared with 1 μm-diameter copper micro-particles and organic solvents. A 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate are used for laser ablation of the substrate and laser sintering. From the microscopic observations and property evaluations of the laser-processed ferrite/epoxy resin substrate with copper, the following conclusions are obtained: (1) The paste prepared with 1 μm-diameter copper and organic solvents made it possible a small-volume dispensing as well as a good laser sintering; (2) The use of 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate, resulting in the formation of the laser-sintered film with 20 μm in thickness and 15 μΩ·cm in specific resistance. No damage to the substrate occurred; (3) The adhesion between the sintered film and the substrate is attributed to the removal of the surface epoxy layer by laser ablation. Copper micro-particles penetrate to the exposed ferrite particles, being mechanically locked with each other at the interface; (4) The scratch test with a cotton swab and the peel test with an adhesion tape show that no separation took place at the interface.