电力电子器件用铁氧体/环氧树脂基板上铜微粒的按需激光烧结

H. Sonoda, R. Atsumi, M. Mita, K. Yamasaki, K. Maekawa
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引用次数: 1

摘要

用1 μm直径的铜微粒和有机溶剂制备浆料,通过激光烧结在铁氧体/环氧树脂基体上进行粗铜布线。532 nm波长的Nd:YVO4绿色激光器对铜微粒膏体和铁氧体/环氧树脂基板均有较高的吸附性能,用于基板的激光烧蚀和激光烧结。通过对激光加工铁氧体/环氧树脂基板的微观观察和性能评价,得出以下结论:(1)用1 μm直径的铜和有机溶剂制备的浆料可以实现小体积点胶和良好的激光烧结;(2)使用532 nm波长的Nd:YVO4绿色激光器对铜微粒膏体和铁氧体/环氧树脂基板均有较高的吸附,形成了厚度为20 μm、比电阻为15 μΩ·cm的激光烧结膜。基材未发生损坏;(3)烧结膜与基体之间的粘附是由于激光烧蚀去除表面环氧层。铜微粒渗透到暴露的铁氧体微粒中,在界面处相互机械锁定;(4)棉棒划伤试验和胶带剥离试验表明,界面处未发生分离。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On-demand laser-sintering of copper micro-particles on ferrite/epoxy resin substrates for power electronics devices
Thick copper wiring on ferrite/epoxy resin substrate was carried out by laser sintering of the paste prepared with 1 μm-diameter copper micro-particles and organic solvents. A 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate are used for laser ablation of the substrate and laser sintering. From the microscopic observations and property evaluations of the laser-processed ferrite/epoxy resin substrate with copper, the following conclusions are obtained: (1) The paste prepared with 1 μm-diameter copper and organic solvents made it possible a small-volume dispensing as well as a good laser sintering; (2) The use of 532 nm-wavelength Nd:YVO4 green laser has a high adsorption both to the copper micro-particle paste and to the ferrite/epoxy resin substrate, resulting in the formation of the laser-sintered film with 20 μm in thickness and 15 μΩ·cm in specific resistance. No damage to the substrate occurred; (3) The adhesion between the sintered film and the substrate is attributed to the removal of the surface epoxy layer by laser ablation. Copper micro-particles penetrate to the exposed ferrite particles, being mechanically locked with each other at the interface; (4) The scratch test with a cotton swab and the peel test with an adhesion tape show that no separation took place at the interface.
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