PPy材料作为pH敏感膜的特性研究

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352039

Zumin Wang, Z. Ren, Jinghong Han, C. Bian, S. Xia

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引用次数: 4

摘要

研究开发了一种基于标准CMOS技术的单片pH传感器系统。该微系统包括片上集成的差分ISFET/REFET传感器件、金属构造的伪参比电极(PRE)及其相关的信号处理电路。本文主要介绍了电化学聚合法制备聚吡咯(PPy)膜，并将其作为pH敏感材料生长在ISFET栅极上。通过一系列实验，在1 ~ 12的pH范围内获得了56mV/pH的高灵敏度。最后讨论了试剂和聚合参数对pH传感器系统的影响。

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Characteristics of the PPy Material as pH Sensitive Membrane

A monolithic pH sensor system has been studied and developed, based on standard CMOS technology. The micro system includes an on-chip integration of differential ISFET/REFET sensing devices, metal constructed pseudo reference electrode (PRE) and their relative signal processing circuits. We mainly present the development of PPy(polypyrrole) membrane by the way of electrochemical polymerization, which was grown on the gate of ISFET, as pH sensitive material. With a series of experiments, a high sensitivity of 56mV/pH was achieved within the pH range from 1 to 12. In the end, we discussed the influence of reagents and polymerization parameters on the pH sensor system.

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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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