一种采用主动和常闭阀的耐高压微型泵

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838495

J. Shinohara, M. Suda, K. Furuta, T. Sakuhara

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引用次数: 22

摘要

利用微机械技术，研制了一种具有两个主动常闭阀的新型微泵。该微泵可以进行正向和反向泵送，即使流体源有一定压力，也能不消耗能量地保持流体。这种常闭阀是由玻璃基板与硅基板粘合后填充硅橡胶浆料的方式制造而成。这种硅橡胶起着“闸门”的作用，可以切断水流。因此，在不受制造误差影响的情况下，实现了高耐压微泵。本文介绍了该微泵的流量、出口压力和耐压等基本特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A high pressure-resistance micropump using active and normally-closed valves

A novel micropump that has two active and normally-closed valves was developed using micromachine technology. This micropump can pump in forward and backward direction, and hold the fluid without consuming energy even when the fluid source has some pressure. This normally-closed valve is manufactured in the way of filling up silicone rubber paste after bonding glass substrate and silicon substrate. This silicone rubber works as a "gate" for shutting off the flow. Therefore, high pressure-resistance micropump is realized with no influence of fabrication error. In this paper, basic characteristics of this micropump about flow rate, outlet pressure and pressure-resistance are described.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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