后硅表征测试载体的质量问题

M. Sauer, A. Czutro, B. Becker, I. Polian
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引用次数: 13

摘要

后硅验证,即在大批量生产开始前对少量制造电路实例进行物理表征,已成为集成电路生产的重要步骤。硅后验证需要识别复杂的逻辑或电气错误,这些错误在硅前验证期间无法发现。此外,物理表征对于确定所制造电路实例的性能分布和得出性能成品率是有用的。与基于模拟的验证或制造测试的矢量相比,用于此步骤的测试矢量受到不同的要求。特别是,他们必须敏感电路中非常全面的一组路径,假设巨大的变化和可能的建模缺陷。一个不充分的测试向量集可能导致过于乐观的产量估计和错误的生产决策。另一方面,测试向量集的大小不像验证或制造测试那么重要。在本文中,我们系统地研究了所使用的测试向量的质量与产量性能预测的准确性之间的关系。我们使用一种高效的基于sat的算法来生成基于简单模型假设的综合测试向量集,并使用包含过程变化影响的模拟电路实例验证这些测试集。得到的向量集也可以作为自适应制造测试的基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On the quality of test vectors for post-silicon characterization
Post-silicon validation, i.e., physical characterization of a small number of fabricated circuit instances before start of high-volume manufacturing, has become an essential step in integrated circuit production. Post-silicon validation is required to identify intricate logic or electrical bugs which could not be found during pre-silicon verification. In addition, physical characterization is useful to determine the performance distribution of the manufactured circuit instances and to derive performance yield. Test vectors used for this step are subject to different requirements compared to vectors for simulation-based verification or for manufacturing test. In particular, they must sensitize a very comprehensive set of paths in the circuit, assuming massive variations and possible modeling deficiencies. An inadequate test vector set may result in overly optimistic yield estimates and wrong manufacturing decisions. On the other hand, the size of the test vector set is less important than in verification or manufacturing test. In this paper, we systematically investigate the relationship between the quality of the employed test vectors and the accuracy of yield-performance predictions. We use a highly efficient SAT-based algorithm to generate comprehensive test vector sets based on simple model assumptions and validate these test sets using simulated circuit instances which incorporate effects of process variations. The obtained vector sets can also serve as a basis for adaptive manufacturing test.
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