一种用于可靠性数据分析的柔性试验结构评估系统

ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures Pub Date : 1993-03-22 DOI:10.1109/ICMTS.1993.292921

M. Mori, Y. Kuriyama, N. Shiono

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引用次数: 1

摘要

为实现有效的测量数据采集和可靠性数据分析，开发了具有强大数据处理能力的试验结构评估系统。采用针对可靠性数据定制的统一数据格式，可快速进行数据分析。一个统一的、灵活的系统是通过将离散的测量系统联网，并通过推广测量程序中的通用程序来实现的

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A flexible test structure evaluation system for reliability data analysis

A test structure evaluation system with powerful data processing capability is developed for effective measurement data acquisition and reliability data analysis. Data analysis can be performed quickly with a unified data format customized to reliability data. A unified, flexible system is achieved by networking discrete measuring systems and by generalizing common routines in measurement programs.<>

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ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures

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