TC-NCP细间距铜柱FC键合的工艺考虑

Y. Cheung, Ka San Lam, G. Mak, Dewen Tian, Ming Li
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引用次数: 2

摘要

在预涂NCP(不导电浆料)作为底填料进行细间距铜柱倒装芯片(FC)热压键合时,需要对工艺参数进行优化,以保证合理的键合成品率。否则,许多与NCP相关的故障,如NCP失效、焊料滞留在焊接界面、焊盘无焊料润湿等,都会影响TC焊接的质量。在较窄的工艺窗口内操作可获得满意的结果。研究了一些主要参数对提高TC-NCP键合质量的影响及其工艺考虑。这些研究包括:(i) NCP点胶;(ii)粘合工具设置,如其下降速度和初始温度;(iii)用于使焊料变形和扩大其粘合面积的施加压缩力曲线;(iv)粘合温度曲线,该曲线定义了加热和冷却速度、粘合峰值温度、固化温度、焊料润湿时间和NCP固化时间。适当设置力和温度分布可以促进焊料润湿,并最大限度地减少NCP空洞和填料夹持。影响焊点完整性的其他考虑因素有:相对于焊基板的键合工具的平面化,键合垫设计及其金属化,以及考虑给定金属化上焊料润湿性的适当NCP的选择。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Process considerations of TC-NCP fine-pitch copper pillar FC bonding
In the presence of pre-applied NCP (non conductive paste) as underfill for thermo-compression (TC) bonding of fine-pitch copper pillar flip-chip (FC), careful optimization of the process parameters is needed to ensure reasonable bonding yield. Otherwise, many NCP-related failures such as NCP voiding, filler entrapment at soldering interfaces, no solder wetting on bond pads and etc., will affect the quality of the TC bonding. Satisfactory results can be obtained by operating in a narrow process window. We have investigated the effects of some major parameters and their process considerations for improving bond quality of TC-NCP bonding. These include the studies on: (i) NCP dispensing, (ii) bond tool setting such as its descending speed and initial temperature (iii) the applied compressive force profile for deforming the solder and enlarging its area for bonding, (iv) the bonding temperature profile that defines the heating and cooling rate, the peak bonding temperature, the curing temperature, the time for solder wetting and NCP curing. Proper setting for force and temperature profiles can promote solder wetting and minimize NCP voiding and filler entrapment. Other considerations affecting the solder joint integrity are: the planarization of the bond tool with respect to the bonding substrate, the bond pad design and its metallization as well as the selection of appropriate NCP with the consideration of solder wettability on the given metallization.
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