Cu-Al WB在高温高压下的可靠性评估

P. Lall, S. Jung
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引用次数: 0

摘要

汽车引擎盖下环境中的电子设备可能要承受125-200°C的高温。向电动汽车的过渡导致需要能够在高电压偏置下运行的电子设备。汽车电子已经同时从一级互连的金线键过渡到铜线键。与金丝键相比,铜具有更小的工艺窗口和更高的腐蚀倾向。关于高温下存在高电压偏置时铜线键的可靠性,目前还缺乏相关信息。本文介绍了氯存在下微电偶腐蚀的多物理场模型。扩散池用于测量氯在不同pH值和不同温度下的扩散率。在三维离子输运模型中引入扩散系数测量,研究不同环境因素对氯离子输运速率的影响。通过测量极化曲线提取了铜、铝和金属间化合物的tafel参数。离子输运的多重物理存在浓度梯度、电位梯度与电偶腐蚀耦合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability Assessment of Cu-Al WB Under High Temperature and High Voltage Bias Application
Electronics in automotive underhood environments may be subjected to high temperature in the range of 125–200°C. Transition to electric vehicles has resulted in need for electronics capable of operation under high voltage bias. Automotive electronics has simultaneously transitioned to copper wire-bond from gold wire-bond for first-level interconnections. Copper has a smaller process window and a higher propensity for corrosion in comparison with gold wire bonds. There is scarce information on the reliability of copper wire bonds in presence of high voltage bias under operation at high temperature. In this paper, a multiphysics model for micro galvanic corrosion in the presence of chlorine is introduced. The diffusion cell is used to measure the diffusivity of chlorine in different pH values and different temperatures. Diffusivity measurements are incorporated into the 3D ionic transport model to study the effect of different environmental factors on the transport rate of chlorine. The tafel parameters for copper, aluminum and intermetallics have been extracted through measurements of the polarization curves. The multiple physics of ionic transport in presence of concentration gradient, potential gradient is coupled with the galvanic corrosion.
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