{"title":"基于屈曲运动的划痕驱动驱动器的定量分析","authors":"T. Akiyama, H. Fujita","doi":"10.1109/MEMSYS.1995.472603","DOIUrl":null,"url":null,"abstract":"This paper presents a surface micromachined polysilicon actuator which employs an electrostatic driven Scratch Drive Actuator (SDA) to generate a force that can move an extemal object. The micro actuator consists of the SDA, a link frame and a buckling beam. Using this structure, generated forces of the SDA as a function of applied pulse peak voltages were measured. A typical generated force was 63 pN at +112 V pulse peak voltage. Indirect and direct methods of obtaining physical work from the micro actuator are presented. The actuator could lift 1 mg weight up at a height of about 100 pm from the wafer surface by the direct method. The total energy of this work was 1 nJ.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"363 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"74","resultStr":"{\"title\":\"A quantitative analysis of Scratch Drive Actuator using buckling motion\",\"authors\":\"T. Akiyama, H. Fujita\",\"doi\":\"10.1109/MEMSYS.1995.472603\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a surface micromachined polysilicon actuator which employs an electrostatic driven Scratch Drive Actuator (SDA) to generate a force that can move an extemal object. The micro actuator consists of the SDA, a link frame and a buckling beam. Using this structure, generated forces of the SDA as a function of applied pulse peak voltages were measured. A typical generated force was 63 pN at +112 V pulse peak voltage. Indirect and direct methods of obtaining physical work from the micro actuator are presented. The actuator could lift 1 mg weight up at a height of about 100 pm from the wafer surface by the direct method. The total energy of this work was 1 nJ.\",\"PeriodicalId\":273283,\"journal\":{\"name\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"volume\":\"363 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-01-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"74\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1995.472603\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A quantitative analysis of Scratch Drive Actuator using buckling motion
This paper presents a surface micromachined polysilicon actuator which employs an electrostatic driven Scratch Drive Actuator (SDA) to generate a force that can move an extemal object. The micro actuator consists of the SDA, a link frame and a buckling beam. Using this structure, generated forces of the SDA as a function of applied pulse peak voltages were measured. A typical generated force was 63 pN at +112 V pulse peak voltage. Indirect and direct methods of obtaining physical work from the micro actuator are presented. The actuator could lift 1 mg weight up at a height of about 100 pm from the wafer surface by the direct method. The total energy of this work was 1 nJ.
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