电感耦合等离子体反应离子蚀刻GaN沟槽结构角形控制

{"title":"电感耦合等离子体反应离子蚀刻GaN沟槽结构角形控制","authors":"S. Yamada, Takashi Ishida, Toshiyuki Nakamura, R. Kamimura, Jun Suda, T. Kachi","doi":"10.7567/ssdm.2021.d-7-07","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":185590,"journal":{"name":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Corner Shape Control of GaN Trench Structure Formed by Inductively Coupled Plasma Reactive Ion Etching\",\"authors\":\"S. Yamada, Takashi Ishida, Toshiyuki Nakamura, R. Kamimura, Jun Suda, T. Kachi\",\"doi\":\"10.7567/ssdm.2021.d-7-07\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":185590,\"journal\":{\"name\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.7567/ssdm.2021.d-7-07\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.7567/ssdm.2021.d-7-07","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}