热循环条件下胶粘剂倒装片粘接组件的原位云纹测量

S. Ham, W. Kwon, K. Paik, Soon-Bok Lee
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引用次数: 8

摘要

使用倒装芯片技术比其他高密度电子封装方法有许多优点。采用各向异性导电膜(ACFs)或各向异性导电糊(ACPs)的胶粘式倒装芯片键合技术是主要的倒装芯片技术之一,具有芯片-衬底互连长度短、生产率高、封装小型化等优点。因此,许多研究人员和制造商对这种粘合剂倒装芯片连接方案感兴趣。此外,热变形的理解已被认为是可靠设计粘接倒装片键合组件的关键。本研究采用原位高灵敏度云纹干涉测量法,研究了热循环过程中胶结倒装芯片的热变形。为了实现温度循环,使用了一个带有光学窗的小型热室和便携式工程云纹干涉仪。在25/spl℃和125/spl℃之间的两个热循环中测量了硅片的翘曲量。当组件温度升高到高于玻璃化转变温度(T/sub g/)时,芯片的翘曲完全减小,并且无论之前的温度历史如何,翘曲都用T/sub g/来表征。实验结果表明,原位云纹干涉测量法是表征微电子组件粘接热变形的有效而有力的工具。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
In-situ moire measurement of adhesive flip-chip bonded assembly under thermal cycling condition
The use of flip-chip technology has many advantages over other approaches for high-density electronic packaging. Adhesive flip-chip bonding using ACFs (anisotropic conductive films) or ACPs (anisotropic conductive pastes) is one of the major flip-chip technologies, which has short chip-to-substrate interconnection length, high productivity, and miniaturization of package. Therefore, many researchers and makers are interested in this adhesive flip-chip bonding scheme. In addition, the understanding of thermal deformation has been recognized as the key for a reliable design of adhesive flip-chip bonding assembly. In this study, thermal deformations of adhesive bonded flip-chip-on-board package during thermal cycling were investigated using in-situ high sensitivity moire interferometry. For temperature cycling, a small-sized thermal chamber having an optical window was used with Portable Engineering Moire Interferometer. The warpage of the silicon chip were measured during two thermal cycles between 25/spl deg/C and 125/spl deg/C. When the temperature of the assembly was increased to higher than the glass transition temperature (T/sub g/), the warpage of the chip is fully diminished and the warpage was characterized by the T/sub g/ regardless of previous temperature history. From the test results, it was shown that the in-situ moire interferometry scheme is effective and powerful tool to characterize the thermal deformation of microelectronics assembly using adhesive.
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