开发微电子封装中电化学失效的精密模拟工具

M. van Soestbergen, R. Rongen, K. Jansen, W. V. van Driel
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引用次数: 1

摘要

微电子产品的复杂性和功能集成度不断提高,设计余量不断减少,上市时间不断缩短,技术进步与基础知识之间的差距不断扩大,这对微电子工业满足其产品的质量、稳健性和可靠性要求提出了严峻的挑战。为了满足这些要求,微电子产品的可靠性传统上是通过在较高的外部刺激下进行测试来评估的,例如温度、环境湿度和施加电压。最近,可靠性评估的观点已转向一种称为基于知识的鉴定的方法,在这种方法中,利用计算机模拟故障机制和类似条件下相应产品的可靠性数据,将客户要求和操作条件转化为压力测试条件。虽然在过去的几年中,已经开发了预测包装中吸水率和(热)机械应力的模拟工具,但还没有普遍接受的模拟工具来预测电化学过程对产品性能的影响。然而,能够模拟封装内部电化学过程的模拟工具是严格研究由键垫腐蚀或金属化处枝晶沉积生长等原因引起的故障所不可或缺的工具。在这篇演讲中,我们提出了一个离子传输的模型,该模型与电极上电化学电荷转移速率的关系相耦合。我们给出了实际二维结构模型的计算结果,并与实验数据进行了比较。我们将证明实验结果和模型结果吻合得很好。此外,我们将表明,我们提出的模型可以明确地纳入当前的热机械模拟模型。最后,我们将讨论未来的趋势,并讨论用于预测微电子可靠性的复杂仿真工具的前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of an elaborate simulation tool for electrochemical failures in microelectronic packages
The ever increasing complexity and function integration of microelectronic products in combination with the decreasing design margins, the decreasing time-to-market, and ever increasing gap between technology advance and fundamental knowledge opposes a severe challenge for the microelectronics industry to meet the quality, robustness, and reliability requirements of their products. In order to meet these requirements, the reliability of microelectronic products is traditionally assessed using tests at elevated external stimuli, such as temperature, ambient humidity and applied voltage. Recently, the perspective of reliability assessments has shifted towards an approach referred to as knowledge-based qualification, where costumer requirements and operational conditions are translated to stress tests conditions using computer simulations for failure mechanisms and reliability data from corresponding products under comparable conditions. While in the past years simulations tools to predict water absorption and (thermo-)mechanical stresses in packages have been developed, there are no generally accepted simulation tools to predict the effect of electrochemical processes on the performance of products. However, simulation tools that are capable of modelling the electrochemical processes at the interior of packages are indispensable instruments to rigorously study failures due to, e.g., the corrosion of bondpads or the growth of dendritic deposits at metallizations. In this talk a model for the transport of ionic species coupled to a relation for the electrochemical charge transfer rate at electrode is presented. We show results of this model for realistic two-dimensional structures and compare the results with experimental data. We will show that the experimental and model results agree well each other. Additionally, we will show that the model we present can be unequivocally incorporated in the current thermo-mechanical simulation models. Finally, we will address future trends and discuss the perspectives of elaborate simulation tools for the prediction of microelectronics reliability.
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