利用前后通道顺序热电子应力对SOI mosfet栅极氧化物进行连续充放电

A. Zaleski, D. Ioannou, G. Campisi, H. Hughes
{"title":"利用前后通道顺序热电子应力对SOI mosfet栅极氧化物进行连续充放电","authors":"A. Zaleski, D. Ioannou, G. Campisi, H. Hughes","doi":"10.1109/SOI.1993.344552","DOIUrl":null,"url":null,"abstract":"The purpose of this work is to demonstrate that hot electron stressing one channel in a SOI MOSFET can in fact inject charges into the other channel, and it discusses two important applications of this phenomenon: namely, that it can be used as a new tool for the study of the mechanisms of degradation, and for designing erasing schemes for SOI based flash memories. The measurements were performed on partially and fully depleted SIMOX MOSFETs with LDD and channel lengths down to 0.6 /spl mu/m.<<ETX>>","PeriodicalId":308249,"journal":{"name":"Proceedings of 1993 IEEE International SOI Conference","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Successive charging/discharging of gate oxides in SOI MOSFETs by sequential hot electron stressing of front/back channel\",\"authors\":\"A. Zaleski, D. Ioannou, G. Campisi, H. Hughes\",\"doi\":\"10.1109/SOI.1993.344552\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The purpose of this work is to demonstrate that hot electron stressing one channel in a SOI MOSFET can in fact inject charges into the other channel, and it discusses two important applications of this phenomenon: namely, that it can be used as a new tool for the study of the mechanisms of degradation, and for designing erasing schemes for SOI based flash memories. The measurements were performed on partially and fully depleted SIMOX MOSFETs with LDD and channel lengths down to 0.6 /spl mu/m.<<ETX>>\",\"PeriodicalId\":308249,\"journal\":{\"name\":\"Proceedings of 1993 IEEE International SOI Conference\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-10-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1993 IEEE International SOI Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.1993.344552\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1993 IEEE International SOI Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1993.344552","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

这项工作的目的是证明热电子在SOI MOSFET中施加一个通道实际上可以将电荷注入另一个通道,并讨论了这一现象的两个重要应用:即,它可以用作研究退化机制的新工具,并用于设计基于SOI的闪存的擦除方案。测量是在部分耗尽和完全耗尽的SIMOX mosfet上进行的,LDD和沟道长度低至0.6 /spl mu/m。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Successive charging/discharging of gate oxides in SOI MOSFETs by sequential hot electron stressing of front/back channel
The purpose of this work is to demonstrate that hot electron stressing one channel in a SOI MOSFET can in fact inject charges into the other channel, and it discusses two important applications of this phenomenon: namely, that it can be used as a new tool for the study of the mechanisms of degradation, and for designing erasing schemes for SOI based flash memories. The measurements were performed on partially and fully depleted SIMOX MOSFETs with LDD and channel lengths down to 0.6 /spl mu/m.<>
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信