Min-Cheng Chen, Chang-Hsien Lin, Chia-Yi Lin, F. Hsueh, Wen-Hsien Huang, Yu-Chung Lien, Hsiu-Chih Chen, Hsiao-Ting Hsueh, Che-Wei Huang, Chih-Ting Lin, Yin-Chih Liu, Ta-Hsien Lee, M. Hua, J. Qiu, Mao-Chen Liu, Yao-Jen Lee, J. Shieh, C. Ho, C. Hu, Fu-Liang Yang
{"title":"基于自对准无掩膜薄膜晶体管的SoC生物电子学的亚fm DNA灵敏度","authors":"Min-Cheng Chen, Chang-Hsien Lin, Chia-Yi Lin, F. Hsueh, Wen-Hsien Huang, Yu-Chung Lien, Hsiu-Chih Chen, Hsiao-Ting Hsueh, Che-Wei Huang, Chih-Ting Lin, Yin-Chih Liu, Ta-Hsien Lee, M. Hua, J. Qiu, Mao-Chen Liu, Yao-Jen Lee, J. Shieh, C. Ho, C. Hu, Fu-Liang Yang","doi":"10.1109/VLSIT.2012.6242494","DOIUrl":null,"url":null,"abstract":"This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics\",\"authors\":\"Min-Cheng Chen, Chang-Hsien Lin, Chia-Yi Lin, F. Hsueh, Wen-Hsien Huang, Yu-Chung Lien, Hsiu-Chih Chen, Hsiao-Ting Hsueh, Che-Wei Huang, Chih-Ting Lin, Yin-Chih Liu, Ta-Hsien Lee, M. Hua, J. Qiu, Mao-Chen Liu, Yao-Jen Lee, J. Shieh, C. Ho, C. Hu, Fu-Liang Yang\",\"doi\":\"10.1109/VLSIT.2012.6242494\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.\",\"PeriodicalId\":266298,\"journal\":{\"name\":\"2012 Symposium on VLSI Technology (VLSIT)\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Symposium on VLSI Technology (VLSIT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSIT.2012.6242494\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Symposium on VLSI Technology (VLSIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.2012.6242494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics
This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.
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