适用于硬盘驱动器应用的CMOS-MEMS旋转微致动器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285802

W. Messner, J. Bain, M. Koenders, J. Groenesteijn, G. H. Marsman, P. Gilgunn, G. Fedder

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引用次数: 8

摘要

本文介绍了一种利用CMOS-MEMS技术制作的电热旋转驱动器。本文讨论的装置显示旋转行程超过10º，电热驱动截止频率为300 Hz。器件占地面积小于1mm × 1mm，功耗小于10mw。上述性能和器件拓扑使其在硬盘驱动器(HDD)磁头驱动应用中具有吸引力。本文详细介绍了该器件的制造和特性，以及将其性能扩展到HDD应用所需水平的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A CMOS-MEMS rotary microactuator suitable for hard disk drive applications

This work presents an electrothermal rotary actuator fabricated using CMOS-MEMS technology. The device discussed herein shows a rotational stroke of more than 10º and an electrothermal actuation cut-off frequency of 300 Hz. The device footprint is less than 1 mm × 1 mm and power consumption is less than 10 mW. The above performance and the device topology make it attractive for application in hard disk drive (HDD) head actuation applications. This paper details fabrication and characterization of this device and methods for extending its performance to levels needed for HDD applications.

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来源期刊

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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