印刷电子产品不同导电层的激光图板工艺研究

Wenhe Feng, X. Shan, G. Lim
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引用次数: 0

摘要

利用纳秒激光烧蚀技术研究了不同导电材料的图像化。材料分别是不同厚度的印刷银(Ag)电极、层压铝(Al)膜、ITO薄膜和PEDOT:PSS导电聚合物薄层。作者研究了利用1064nm波长,20纳秒脉冲激光束剥离导电层的可行性,以便将大面积导电材料或痕迹电隔离成适当的片段或图案。更重要的是,烧蚀过程可以控制在对底层支撑材料产生最小干扰的同时,完全去除导电层并留下很少的残留物。在本项目中所获得的烧蚀轨道宽度取决于涂层材料和工艺参数。通常情况下,使用激光图案系统获得的最小线宽分别为印刷银$60\ \mu \ mathm {m}$, Al $33\ \mu \ mathm {m}$, ITO层$28\ \mu \ mathm {m}$和PEDOT:PSS层$32\ \mu \ mathm {m}$。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Process Study of Laser Patterning of Different Conductive Layers for Printed Electronics
Patterning of different conductive materials utilising nanosecond laser ablation was studied. The materials are namely printed silver (Ag) electrodes, laminated aluminium (Al) films, ITO thin films and PEDOT:PSS conductive polymer thin layer of different thicknesses. The authors investigated the feasibility of using 1064 nm wavelength, 20 nanosecond pulsed laser beam to strip off the conductive layers in order to electrically isolate the large area conductive materials or traces into appropriate segments or patterns. More importantly, the ablation process could be controlled to induce minimal interference to the underlying supporting materials while removing completely the conductive layer with very little residue. The ablated track widths the authors achieved in this project depends on the coating material and process parameters. Typically, the minimum line widths obtained using the laser patterning system were $60\ \mu \mathrm{m}$ for printed silver, $33\ \mu \mathrm{m}$ for Al, $28\ \mu \mathrm{m}$ for ITO layer and $32\ \mu \mathrm{m}$ for PEDOT:PSS, respectively.
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