硅光子学技术中的双向NPN ESD保护

2016 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2016-04-17 DOI:10.1109/IRPS.2016.7574520

R. Boschke, Shih-Hung Chen, G. Hellings, M. Scholz, P. De Heyn, P. Verheyen, J. Van Campenhout, D. Linten, A. Thean, G. Groeseneken

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引用次数: 0

摘要

硅光子中间体实现了CMOS芯片之间低功耗、高带宽的信号传输。光波导传输携带信息的光信号。光调制器和检测器实现光电信号和电信号的转换。这些组件在组装过程中可能面临ESD压力。这项工作深入研究了这些组件的自我保护能力，并提供了一种ESD保护解决方案，以提高ESD稳健性。

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Bidirectional NPN ESD protection in silicon photonics technology

Silicon photonics interposers enable low power, high bandwidth signal transfer between CMOS chips. Optical wave guides transfer the optical signal that carries the information. Optical modulator and detectors realize the optical to electrical signal transfer and vice versa. These components could be facing ESD stress during assembly. This work presents an in-depth study the self-protecting capabilities of these components and provides an ESD protection solution to increase the ESD robustness.

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2016 IEEE International Reliability Physics Symposium (IRPS)

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