{"title":"基于电极工程的太赫兹侧型β-Ga2O3 MOSFET阶梯氧化和不对称掺杂设计的TCAD研究","authors":"Priyanshi Goyal, H. Kaur","doi":"10.1109/LAEDC58183.2023.10209136","DOIUrl":null,"url":null,"abstract":"This work presents exhaustive TCAD investigation of Step-Oxide- Dual Material Gate with Asymmetric Doping engineering on lateral $\\beta-Ga_{2}O_{3}$ MOSFET. The objective of this work is to achieve high frequency performance. Several device attributes such as output and transfer characteristics, transconductance, parasitic capacitances and cut-off frequency etc., have been studied. Further, various critical figure of merits such as transconductance frequency product, gain bandwidth product etc., have also been obtained. A comparison of the proposed device is drawn with the conventional device. The results highlight that the proposed device is a promising design strategy for RF applications.","PeriodicalId":151042,"journal":{"name":"2023 IEEE Latin American Electron Devices Conference (LAEDC)","volume":"93 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TCAD Investigation of Step-Oxide and Asymmetric Doping Design with Electrode Engineering on Lateral β-Ga2O3 MOSFET for Terahertz Applications\",\"authors\":\"Priyanshi Goyal, H. Kaur\",\"doi\":\"10.1109/LAEDC58183.2023.10209136\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents exhaustive TCAD investigation of Step-Oxide- Dual Material Gate with Asymmetric Doping engineering on lateral $\\\\beta-Ga_{2}O_{3}$ MOSFET. The objective of this work is to achieve high frequency performance. Several device attributes such as output and transfer characteristics, transconductance, parasitic capacitances and cut-off frequency etc., have been studied. Further, various critical figure of merits such as transconductance frequency product, gain bandwidth product etc., have also been obtained. A comparison of the proposed device is drawn with the conventional device. The results highlight that the proposed device is a promising design strategy for RF applications.\",\"PeriodicalId\":151042,\"journal\":{\"name\":\"2023 IEEE Latin American Electron Devices Conference (LAEDC)\",\"volume\":\"93 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE Latin American Electron Devices Conference (LAEDC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LAEDC58183.2023.10209136\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE Latin American Electron Devices Conference (LAEDC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LAEDC58183.2023.10209136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
TCAD Investigation of Step-Oxide and Asymmetric Doping Design with Electrode Engineering on Lateral β-Ga2O3 MOSFET for Terahertz Applications
This work presents exhaustive TCAD investigation of Step-Oxide- Dual Material Gate with Asymmetric Doping engineering on lateral $\beta-Ga_{2}O_{3}$ MOSFET. The objective of this work is to achieve high frequency performance. Several device attributes such as output and transfer characteristics, transconductance, parasitic capacitances and cut-off frequency etc., have been studied. Further, various critical figure of merits such as transconductance frequency product, gain bandwidth product etc., have also been obtained. A comparison of the proposed device is drawn with the conventional device. The results highlight that the proposed device is a promising design strategy for RF applications.