基于电极工程的太赫兹侧型β-Ga2O3 MOSFET阶梯氧化和不对称掺杂设计的TCAD研究

Priyanshi Goyal, H. Kaur
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引用次数: 0

摘要

本文介绍了在$\ β - ga_ {2}O_{3}$ MOSFET上采用不对称掺杂工程的阶梯氧化双材料栅极的详尽的TCAD研究。这项工作的目标是实现高频性能。研究了器件的输出和转移特性、跨导、寄生电容和截止频率等特性。此外,还得到了跨导频率积、增益带宽积等各种性能的临界值。将所提出的装置与常规装置进行了比较。结果表明,所提出的器件是一种很有前途的射频应用设计策略。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
TCAD Investigation of Step-Oxide and Asymmetric Doping Design with Electrode Engineering on Lateral β-Ga2O3 MOSFET for Terahertz Applications
This work presents exhaustive TCAD investigation of Step-Oxide- Dual Material Gate with Asymmetric Doping engineering on lateral $\beta-Ga_{2}O_{3}$ MOSFET. The objective of this work is to achieve high frequency performance. Several device attributes such as output and transfer characteristics, transconductance, parasitic capacitances and cut-off frequency etc., have been studied. Further, various critical figure of merits such as transconductance frequency product, gain bandwidth product etc., have also been obtained. A comparison of the proposed device is drawn with the conventional device. The results highlight that the proposed device is a promising design strategy for RF applications.
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