基于纳米片CMOS器件和三维顺序集成的Si和SiGe外延生长

{"title":"基于纳米片CMOS器件和三维顺序集成的Si和SiGe外延生长","authors":"Roger Loo, A. Hikavyy, C. Porret, E. Rosseel, G. Rengo, Rami Khazaka, Qi Xie, André Vantomme, Robert Langer","doi":"10.7567/ssdm.2021.k-6-01","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":185590,"journal":{"name":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Si and SiGe Epitaxial Growth in view of Nanosheet CMOS Devices and 3D Sequential Integration\",\"authors\":\"Roger Loo, A. Hikavyy, C. Porret, E. Rosseel, G. Rengo, Rami Khazaka, Qi Xie, André Vantomme, Robert Langer\",\"doi\":\"10.7567/ssdm.2021.k-6-01\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":185590,\"journal\":{\"name\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.7567/ssdm.2021.k-6-01\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.7567/ssdm.2021.k-6-01","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}