J. Lamovec, V. Jović, B. Popović, D. Vasiljević-Radović, R. Aleksić, V. Radojević
{"title":"铜基底电沉积Ni/Cu多层薄膜的结构和显微硬度表征","authors":"J. Lamovec, V. Jović, B. Popović, D. Vasiljević-Radović, R. Aleksić, V. Radojević","doi":"10.1109/MIEL.2010.5490498","DOIUrl":null,"url":null,"abstract":"Multilayered composite systems of alternately electrodeposited nanocrystalline Cu and Ni films on cold-rolled microcrystalline copper substrates were fabricated. Highly-densified parallel interfaces which can give rise to high strength of composites are obtained by depositing layers at a very narrow spacing. The mechanical properties of the composite systems were characterized using Vickers microhardness testing with loads ranging from 1.96 N down to 0.049 N. Dependence of microhardness on layer thickness, Ni/Cu layer thickness ratio and total thickness of the film was investigated. The microhardness increased with decreasing the layer thickness down to 30 nm and it is consistent with the Hall-Petch relation. Composite hardness model of Korsunsky was applied to the experimental data in order to determine the composite film hardness. The highest value of all the composite film hardness values was obtained when the ratio of Ni : Cu layer thickness was 4:1.","PeriodicalId":271286,"journal":{"name":"2010 27th International Conference on Microelectronics Proceedings","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Structural and microhardness characterization of thin electrodeposited Ni/Cu multilayers on copper substrates\",\"authors\":\"J. Lamovec, V. Jović, B. Popović, D. Vasiljević-Radović, R. Aleksić, V. Radojević\",\"doi\":\"10.1109/MIEL.2010.5490498\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Multilayered composite systems of alternately electrodeposited nanocrystalline Cu and Ni films on cold-rolled microcrystalline copper substrates were fabricated. Highly-densified parallel interfaces which can give rise to high strength of composites are obtained by depositing layers at a very narrow spacing. The mechanical properties of the composite systems were characterized using Vickers microhardness testing with loads ranging from 1.96 N down to 0.049 N. Dependence of microhardness on layer thickness, Ni/Cu layer thickness ratio and total thickness of the film was investigated. The microhardness increased with decreasing the layer thickness down to 30 nm and it is consistent with the Hall-Petch relation. Composite hardness model of Korsunsky was applied to the experimental data in order to determine the composite film hardness. The highest value of all the composite film hardness values was obtained when the ratio of Ni : Cu layer thickness was 4:1.\",\"PeriodicalId\":271286,\"journal\":{\"name\":\"2010 27th International Conference on Microelectronics Proceedings\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-05-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 27th International Conference on Microelectronics Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MIEL.2010.5490498\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 27th International Conference on Microelectronics Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2010.5490498","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
摘要
在冷轧微晶铜衬底上制备了电沉积纳米晶Cu和Ni薄膜的多层复合体系。通过在极窄的间距上沉积层,可以获得高密度的平行界面,从而提高复合材料的强度。在1.96 N ~ 0.049 N载荷范围内,采用维氏显微硬度测试表征了复合材料的力学性能。研究了镀层厚度、Ni/Cu镀层厚度比和镀层总厚度对镀层显微硬度的影响。显微硬度随层厚的减小而增大,厚度减小至30 nm,符合Hall-Petch关系。采用Korsunsky的复合硬度模型对实验数据进行分析,确定复合膜的硬度。当Ni: Cu层厚度比为4:1时,复合膜硬度值最高。
Structural and microhardness characterization of thin electrodeposited Ni/Cu multilayers on copper substrates
Multilayered composite systems of alternately electrodeposited nanocrystalline Cu and Ni films on cold-rolled microcrystalline copper substrates were fabricated. Highly-densified parallel interfaces which can give rise to high strength of composites are obtained by depositing layers at a very narrow spacing. The mechanical properties of the composite systems were characterized using Vickers microhardness testing with loads ranging from 1.96 N down to 0.049 N. Dependence of microhardness on layer thickness, Ni/Cu layer thickness ratio and total thickness of the film was investigated. The microhardness increased with decreasing the layer thickness down to 30 nm and it is consistent with the Hall-Petch relation. Composite hardness model of Korsunsky was applied to the experimental data in order to determine the composite film hardness. The highest value of all the composite film hardness values was obtained when the ratio of Ni : Cu layer thickness was 4:1.