倒装芯片封装热-湿-机械失效的有限元分析

Biao Liu, Mingxiang Wang, T. Lam
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引用次数: 11

摘要

叠片级封装(SCSP)已成为实现高密度三维封装的重要途径。在SCSP过程中,封装将承受几个热负荷,如模具附着(DA)固化,成型后固化和回流。如果内部封装材料之间的热不匹配过大,在封装完成之前,热应力可能导致模具开裂或分层。本文对典型的四芯片SCSP产品FTA073的封装工艺进行了详细的研究。有限元分析(FEA)已应用于三个主要工艺步骤,包括第一个DA固化(固化I),第2 /3 /4个DA固化(固化II)和成型后固化(固化III)。通过比较这三个固化过程对SCSP可靠性的影响,我们的工艺模拟表明,固化II将是最具破坏性的。还发现,固化I和固化II在由15个单元包组成的包块上形成了一定的具有典型特征的分布应力,而固化III则没有形成这种特征。我们的研究将有助于减少包装过程中的失效和提高产量
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Finite element analysis of thermo-hygro-mechanical failure of a flip chip package
Stacked chip scale packaging (SCSP) has been an increasingly important approach for realizing high density 3D packaging. During SCSP process, package will endure several thermal loadings, such as die attach (DA) cure, post-molding cure and reflow. Thermal stress may result in die crack or delamination before package is finished if thermal mismatch between internal packaging materials is too much. In this study, packaging process for a typical four-chip SCSP product, FTA073, is studied in detail. Finite element analysis (FEA) has been applied in three major process steps which experience temperature change for package failures in die crack or delamination, including the 1st DA cure (cure I), the 2nd/3rd/4th DA cure (cure II) and post-molding cure (cure III). Our process simulation demonstrates that cure II would be the most destructive by comparing the influence of these three curing processes on SCSP reliability. It is also found that, in cure I and cure II a certain distribution stress with typical characteristics is formed on package block which consists of 15 unit packages, however, no such characteristics was formed in step cure III. Our investigation would be beneficial to reducing package failures and increasing yields during packaging process
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