三叉戟型音叉硅陀螺仪由相位差检测

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838569

M. Abe, E. Shinohara, K. Hasegawa, S. Murata, M. Esashi

{"title":"三叉戟型音叉硅陀螺仪由相位差检测","authors":"M. Abe, E. Shinohara, K. Hasegawa, S. Murata, M. Esashi","doi":"10.1109/MEMSYS.2000.838569","DOIUrl":null,"url":null,"abstract":"The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has a Q value higher than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. The gyroscope sensitivity obtained was 180 /spl mu/V/deg/sec.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Trident-type tuning fork silicon gyroscope by the phase difference detection\",\"authors\":\"M. Abe, E. Shinohara, K. Hasegawa, S. Murata, M. Esashi\",\"doi\":\"10.1109/MEMSYS.2000.838569\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has a Q value higher than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. The gyroscope sensitivity obtained was 180 /spl mu/V/deg/sec.\",\"PeriodicalId\":251857,\"journal\":{\"name\":\"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-01-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2000.838569\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838569","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 11

摘要

设计并制作了三叉戟式音叉硅陀螺仪。三叉戟式音叉结构和真空包装，Q值高于15000。提出了一种新的基于相位差检测的检测原理，并用自制的陀螺仪进行了验证。通过这种检测方法，可以在不控制驱动幅值的情况下检测出角速度。得到的陀螺仪灵敏度为180 /spl μ /V/度/秒。

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Trident-type tuning fork silicon gyroscope by the phase difference detection

The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has a Q value higher than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. The gyroscope sensitivity obtained was 180 /spl mu/V/deg/sec.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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