{"title":"应力相关活化能","authors":"J. McPherson","doi":"10.1109/IRPS.1986.362105","DOIUrl":null,"url":null,"abstract":"Due to recent reports of stress-dependent activation energy, a generalized Eyring model has been developed in order to better understand thermally activated failure mechanisms. The model predicts a stress-dependent activation energy provided two necessary requirements are satisfied: (1) the applied stress must be the same order of magnitude as the strength of the material and (2) the stress acceleration parameter ¿ must be a function of the temperature. This model has been successfully applied to diverse failure mechanisms such as: dielectric breakdown under electric-field stress, metal failure under mechanical stress, and electromigration failure under current density stress. Application of model to the specific case of electromigration suggests that the current density exponent N for failure is not a unique value but increases with current density from N=1 at J ¿ 1 × 105 A/cm2 to N¿2 at J ¿ 1 × 106 A/cm2.","PeriodicalId":354436,"journal":{"name":"24th International Reliability Physics Symposium","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1986-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"55","resultStr":"{\"title\":\"Stress Dependent Activation Energy\",\"authors\":\"J. McPherson\",\"doi\":\"10.1109/IRPS.1986.362105\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Due to recent reports of stress-dependent activation energy, a generalized Eyring model has been developed in order to better understand thermally activated failure mechanisms. The model predicts a stress-dependent activation energy provided two necessary requirements are satisfied: (1) the applied stress must be the same order of magnitude as the strength of the material and (2) the stress acceleration parameter ¿ must be a function of the temperature. This model has been successfully applied to diverse failure mechanisms such as: dielectric breakdown under electric-field stress, metal failure under mechanical stress, and electromigration failure under current density stress. Application of model to the specific case of electromigration suggests that the current density exponent N for failure is not a unique value but increases with current density from N=1 at J ¿ 1 × 105 A/cm2 to N¿2 at J ¿ 1 × 106 A/cm2.\",\"PeriodicalId\":354436,\"journal\":{\"name\":\"24th International Reliability Physics Symposium\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1986-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"55\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"24th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1986.362105\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"24th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1986.362105","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 55
摘要
由于最近关于应力相关激活能的报道,为了更好地理解热激活破坏机制,人们开发了一个广义的Eyring模型。如果满足两个必要条件,该模型预测应力相关的活化能:(1)施加的应力必须与材料的强度相同的数量级;(2)应力加速度参数¿必须是温度的函数。该模型已成功应用于多种失效机制,如:电场应力下的介质击穿、机械应力下的金属破坏和电流密度应力下的电迁移破坏。将该模型应用于电迁移的具体实例表明,失效的电流密度指数N不是一个唯一值,而是随着电流密度的增大而增大,从J¿1 × 105 a /cm2时的N=1到J¿1 × 106 a /cm2时的N= 2。
Due to recent reports of stress-dependent activation energy, a generalized Eyring model has been developed in order to better understand thermally activated failure mechanisms. The model predicts a stress-dependent activation energy provided two necessary requirements are satisfied: (1) the applied stress must be the same order of magnitude as the strength of the material and (2) the stress acceleration parameter ¿ must be a function of the temperature. This model has been successfully applied to diverse failure mechanisms such as: dielectric breakdown under electric-field stress, metal failure under mechanical stress, and electromigration failure under current density stress. Application of model to the specific case of electromigration suggests that the current density exponent N for failure is not a unique value but increases with current density from N=1 at J ¿ 1 × 105 A/cm2 to N¿2 at J ¿ 1 × 106 A/cm2.