溅射沉积TiO2薄膜电阻跃迁对电极材料的敏感性

2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) Pub Date : 2016-06-23 DOI:10.1109/IMFEDK.2016.7521687

N. Kawashima, Shingo Sato, Y. Omura

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引用次数: 0

摘要

本文讨论了顶电极(TE)和底电极(BE)材料对溅射沉积TiO2薄膜电阻性转变的影响。从电阻跃迁的物理机制出发，阐明了TiO2薄膜的电子特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Sensitivity of resistive transition of sputter-deposited TiO2 films to electrode material

This paper discusses the influence of top-electrode (TE) and bottom-electrode (BE) materials on the resistive transition of sputter-deposited TiO2 films. The electronic characteristics of the TiO2 films are elucidated from the physical mechanism of resistive transition.

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来源期刊

2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)

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