{"title":"麻省理工学院微系统技术实验室(MTL)的实验室设施","authors":"V. Diadiuk","doi":"10.1109/UGIM.2003.1225691","DOIUrl":null,"url":null,"abstract":"MTL is an Interdepartmental Laboratory of the Massachusetts Institute of Technology (MIT ) whose mission is to provide the facilities necessary to carry out research in nano- and microsystems and structures. In accordance with the multidisciplinary nature of microsystems technology, the faculty, staff, and students using MTL are affiliated with the many schools, departments, and centers of MIT.","PeriodicalId":356452,"journal":{"name":"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)","volume":"369 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laboratory facilities of the microsystems technology laboratories (MTL) at Massachusetts Institute of Technology\",\"authors\":\"V. Diadiuk\",\"doi\":\"10.1109/UGIM.2003.1225691\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MTL is an Interdepartmental Laboratory of the Massachusetts Institute of Technology (MIT ) whose mission is to provide the facilities necessary to carry out research in nano- and microsystems and structures. In accordance with the multidisciplinary nature of microsystems technology, the faculty, staff, and students using MTL are affiliated with the many schools, departments, and centers of MIT.\",\"PeriodicalId\":356452,\"journal\":{\"name\":\"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)\",\"volume\":\"369 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UGIM.2003.1225691\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2003.1225691","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Laboratory facilities of the microsystems technology laboratories (MTL) at Massachusetts Institute of Technology
MTL is an Interdepartmental Laboratory of the Massachusetts Institute of Technology (MIT ) whose mission is to provide the facilities necessary to carry out research in nano- and microsystems and structures. In accordance with the multidisciplinary nature of microsystems technology, the faculty, staff, and students using MTL are affiliated with the many schools, departments, and centers of MIT.
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