超低损耗堆积膜,适用于细间距应用

Ayane Kasahara, Tetsuro Iwakura, Y. Kondo, T. Irino, H. Shimizu
{"title":"超低损耗堆积膜,适用于细间距应用","authors":"Ayane Kasahara, Tetsuro Iwakura, Y. Kondo, T. Irino, H. Shimizu","doi":"10.1109/ICEP.2016.7486779","DOIUrl":null,"url":null,"abstract":"The new ultra-low loss build-up film has been developed by the combination of the matrix layer, which has the semi-IPN structure, and the primer layer. The matrix material was designed and prepared by the original polymer blend modification technology with co-crosslinking reaction of rigid thermosetting resin and the reactive low polar polymer. Dielectric constant and dissipation factor at 1-20 GHz of the film were <;3.4 and <;0.004, respectively. And the film had semi additive process compatibility and small surface roughness after desmear treatment. Wiring formation of 5 / 5μm line and space was demonstrated thereon. The peel strength to the plated Cu on the surface of the film, which had small roughness of <;100 nm, was 0.6 kN/m. The coefficient of thermal expansion was 18ppm/°C.","PeriodicalId":343912,"journal":{"name":"2016 International Conference on Electronics Packaging (ICEP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Ultra low loss build-up film for fine pitch applications\",\"authors\":\"Ayane Kasahara, Tetsuro Iwakura, Y. Kondo, T. Irino, H. Shimizu\",\"doi\":\"10.1109/ICEP.2016.7486779\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The new ultra-low loss build-up film has been developed by the combination of the matrix layer, which has the semi-IPN structure, and the primer layer. The matrix material was designed and prepared by the original polymer blend modification technology with co-crosslinking reaction of rigid thermosetting resin and the reactive low polar polymer. Dielectric constant and dissipation factor at 1-20 GHz of the film were <;3.4 and <;0.004, respectively. And the film had semi additive process compatibility and small surface roughness after desmear treatment. Wiring formation of 5 / 5μm line and space was demonstrated thereon. The peel strength to the plated Cu on the surface of the film, which had small roughness of <;100 nm, was 0.6 kN/m. The coefficient of thermal expansion was 18ppm/°C.\",\"PeriodicalId\":343912,\"journal\":{\"name\":\"2016 International Conference on Electronics Packaging (ICEP)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International Conference on Electronics Packaging (ICEP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEP.2016.7486779\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Electronics Packaging (ICEP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEP.2016.7486779","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

将具有半ipn结构的基体层与底漆层相结合,研制出了新型超低损耗堆积膜。采用原有的聚合物共混改性技术,利用刚性热固性树脂与反应性低极性聚合物共交联反应,设计制备了基体材料。薄膜在1 ~ 20 GHz处介电常数< 3.4,耗散系数< 0.004。涂膜后具有半添加剂的工艺相容性和较小的表面粗糙度。在此基础上论证了5 / 5μm线和空间的布线形成。膜表面粗糙度< 100 nm的镀Cu的剥离强度为0.6 kN/m。热膨胀系数为18ppm/°C。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra low loss build-up film for fine pitch applications
The new ultra-low loss build-up film has been developed by the combination of the matrix layer, which has the semi-IPN structure, and the primer layer. The matrix material was designed and prepared by the original polymer blend modification technology with co-crosslinking reaction of rigid thermosetting resin and the reactive low polar polymer. Dielectric constant and dissipation factor at 1-20 GHz of the film were <;3.4 and <;0.004, respectively. And the film had semi additive process compatibility and small surface roughness after desmear treatment. Wiring formation of 5 / 5μm line and space was demonstrated thereon. The peel strength to the plated Cu on the surface of the film, which had small roughness of <;100 nm, was 0.6 kN/m. The coefficient of thermal expansion was 18ppm/°C.
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