微电子故障分析中故障定位的直流耦合激光感应检测系统

2006 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2006-07-03 DOI:10.1109/IPFA.2006.250981

A. Quah, L. S. Koh, C. Chua, M. Palaniappan, J. Chin, J. Phang

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引用次数: 1

摘要

本文介绍了一种用于微电子故障分析中故障定位的新型直流耦合激光感应检测系统。该方法消除了交流耦合检测系统中固有的伪影，并且能够在没有信号衰减的情况下产生器件的激光诱导电阻变化的精确映射。该方法还能在不产生信号畸变的情况下对大面积断层进行定位

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DC-Coupled Laser Induced Detection System for Fault Localization in Microelectronic Failure Analysis

This paper describes a new dc-coupled laser induced detection system for fault localization in microelectronic failure analysis. This method removes artifacts inherent in ac-coupled detection systems and is capable of producing an accurate mapping of the laser induced resistance change of the devices without signal attenuation. This method is also capable of localizing large area faults without signal distortion

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2006 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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