Materials and elements of constructions for extreme micro- and nanoengineering

This paper presents some analytical findings of thermal investigations on silicon carbide and that-based devices with the view to the prospective change-over to a novel silicon carbide MEMS technology. A SiC-AlN composition is discussed as an attractive candidate for improving the thermal resistance and the reliability of microsystems for various purposes. A series of temperature, pressure, acceleration sensors, working under extreme service conditions like high temperature, hostile environments, radiation has been carried out on the basis of a unified silicon carbide technology.